Mask error tensor and causality of mask error enhancement for low-k1 imaging: theory and experiments

2004 ◽  
Vol 3 (2) ◽  
pp. 269 ◽  
Author(s):  
Chun-Kuang Chen
Keyword(s):  
Imaging Theory ◽  
Theory And Experiments

Mask error tensor and causality of mask error enhancement for low-k 1 imaging: theory and experiments

2002 ◽  
Author(s):  
Chun-Kuang Chen ◽  
Tsai-Sheng Gau ◽  
Jaw-Jung Shin ◽  
Ru-Gun Liu ◽  
Shinn Sheng Yu ◽  
...  
Keyword(s):  
Imaging Theory ◽  
Low K ◽  
Theory And Experiments

Reconstruction of electron holograms recorded in a non-FEG, non-biprism TEM

1995 ◽  
Vol 53 ◽  
pp. 618-619
Author(s):  
Z.L. Wang
Keyword(s):  
Electron Microscope ◽  
Single Crystal ◽  
Experimental Technique ◽  
Transmission Electron Microscope ◽  
The Other ◽  
Electron Holography ◽  
Transmission Electron ◽  
Coherent Sources ◽  
Imaging Theory ◽  
Normal Specimen

An experimental technique for performing electron holography using a non-FEG, non-biprism transmission electron microscope (TEM) has been introduced by Ru et al. A double stacked specimens, one being a single crystal foil and the other the specimen, are loaded in the normal specimen position in TEM. The single crystal, which is placed onto the specimen, is responsible to produce two beams that are equivalent to two virtual coherent sources illuminating the specimen beneath, thus, permitting electron holography of the specimen. In this paper, the imaging theory of this technique is described. Procedures are introduced for digitally reconstructing the holograms.

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