Three-dimensional optical metrology with extended depth-measuring range using a holographic axilens

2003 ◽  
Vol 42 (1) ◽  
pp. 132 ◽  
Author(s):  
Erez Hasman
Keyword(s):  
Three Dimensional ◽  
Optical Metrology ◽  
Measuring Range

Phase sensitive parametric optical metrology: exploring the limits of three-dimensional optical metrology

2012 ◽  
Author(s):  
Richard M. Silver ◽  
Jing Qin ◽  
Bryan M. Barnes ◽  
Hui Zhou ◽  
Ronald Dixson ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Optical Metrology ◽  
Phase Sensitive

A Large Measuring Range Profilometer for Three-Dimensional Surface Topography Measurement

2007 ◽  
Vol 364-366 ◽  
pp. 750-755 ◽  
Author(s):  
Xu Dong Yang ◽  
Jia Chun Li ◽  
Tie Bang Xie
Keyword(s):  
Surface Topography ◽  
Three Dimensional ◽  
Displacement Sensor ◽  
Resistance Force ◽  
Sampling Point ◽  
Measuring Range ◽  
3D Surface Topography ◽  
Control Circuits ◽  
Industrial Control Computer ◽  
Zero Offset

A novel profilometer for three-dimensional (3D) surface topography measurement is presented. The profilometer has large measuring range, high precision and small measuring touch force. It is composed of a two-dimensional (2D) displacement sensor, a 3D platform based on vertical scanning, measuring and control circuits and an industrial control computer. When a workpiece is measured, the vertical undulation of the profile at a sampling point leads to a zero offset of the 2D displacement sensor. According to the zero offset, a piezoelectric actuator and a servo motor drive the vertical scanning platform to move vertically to ensure that the lever returns to its balance position. So the non-linear error caused by the rotation of the lever is very small even if the measuring range is large. When the stylus barges up against a steep wall, the horizontal resistance force results in another zero offset of the 2D displacement sensor. If the zero offset exceeds a quota, the vertical scanning platform descends to make the stylus climb the steep wall successfully. According to the theoretical and experimental analysis, the profilometer can measure roughness, profile of sphere, step, groove and other 3D surfaces with curvature precisely.

Holographic and Video Techniques Applied to Engineering Measurement

1971 ◽  
Vol 4 (12) ◽  
pp. 349-354 ◽  
Author(s):  
J N Butters ◽  
J A Leendertz
Keyword(s):  
Process Control ◽  
Holographic Interferometry ◽  
Speckle Pattern ◽  
Three Dimensional ◽  
Sampling Technique ◽  
Closed Circuit ◽  
Optical Metrology ◽  
Photographic Recording ◽  
Closed Circuit Television ◽  
Convenient Means

In a brief period, lasers have developed from curiosities of the physics laboratory to tools suited to incorporation in complex instrumentation systems. One line of progress has been through the applications of holography and holographic interferometry to engineering metrology where the potential of a precision comparator is realized without a convenient means of using it. The process, however, has formed a basis for development and the progress of holographic metrology is reviewed leading to more general concepts better described as “Coherent Optical Metrology”. The authors' latest developments in this area are described where, by means of a coherent optical sampling technique, three dimensional data is coded onto an electronic video waveform. The method is based on speckle pattern interferometry with optical to electronic interfacing by means of a modified closed-circuit television arrangement. With this instrumentation, most of the measurement facilities of holography are retained without many of the inconveniences arising from photographic recording. The data is processed electronically and displayed or presented in a form suitable for viewing or to actuate a stage of process control.

Instantaneous Measurement of 3D Profiles by Projecting Coded Grating

2005 ◽  
Vol 295-296 ◽  
pp. 495-500
Author(s):  
A.L. Tian ◽  
B. Li ◽  
M.T. Huang ◽  
Zhuang De Jiang
Keyword(s):  
Data Processing ◽  
Measurement System ◽  
Moving Objects ◽  
Three Dimensional ◽  
Profile Measurement ◽  
3D Measurement ◽  
Human Face ◽  
Measuring Range ◽  
Data Processing Software ◽  
Processing Software

A three-dimensional profile measurement system based on a projection coded grating technique is presented. The system uses a designing and decoding technique for grey coded gratings. The coded grating has black, white and grey stripes. The period triples a conventional grating. It greatly increases the height measuring range without any decrease in stripe separation. The shape of object can be obtained from only one grating image. The system is suitable for instantaneous measurement of moving objects including human face. The technique proposed permits rapid 3D measurement and no moving parts are involved in the system. The hardware is relatively simple. Special data processing software is developed. Results of a practical example confirm the effectiveness of the proposed method.

Automated High-Dynamic-Range Three-Dimensional Optical Metrology Technique

2014 ◽  
Author(s):  
Laura Ekstrand ◽  
Song Zhang
Keyword(s):  
Exposure Time ◽  
Measurement System ◽  
High Speed ◽  
Manufacturing Industry ◽  
Dynamic Range ◽  
Three Dimensional ◽  
Optical Metrology ◽  
High Contrast ◽  
Accuracy Measurement ◽  
3D Surfaces

Measuring three-dimensional (3D) surfaces with extremely high contrast (e.g., partially shiny surfaces) is extremely difficult with optical metrology methods. Conventional techniques, which involve measurement from multiple angles or camera aperture adjustments, pose issues for high accuracy measurement in the manufacturing industry because they are difficult to automate and often induce undesirable vibrations in the calibrated measurement system. This paper presents a framework for optically capturing high-contrast 3D surfaces via flexible exposure time variation. This technique leverages the binary defocusing technique that was recently developed at Iowa State University to allow digital fringe projection with a camera exposure time far shorter than the projector’s projection period. Since the camera exposure time can be rapidly adjusted in software, the proposed technique could be automated without mechanical adjustments to the measurement system. Moreover, the exposure times are sufficiently short as to be efficiently packed into a projection period, giving this technique the potential for high speed applications. Experimental results will be presented to demonstrate the success of the proposed method.

scholarly journals Research of three dimensional laser scanning coordinate measuring machine

2018 ◽  
Vol 232 ◽  
pp. 02015
Author(s):  
Zhihua Jiang ◽  
Wenjian Zhang ◽  
Lizhen Cui
Keyword(s):  
3D Printing ◽  
Laser Scanning ◽  
Three Dimensional ◽  
Coordinate Measuring Machine ◽  
Coordinate Measuring Machines ◽  
Measuring Instrument ◽  
Calibration System ◽  
Measuring Range ◽  
Measuring Machine

Three dimensional laser scanning coordinate measuring machine is suitable for the measurement of 3D printing products, and its measuring range depends on the three coordinate measuring machine. It is the main 3D printing product measuring instrument [1]. In this paper, the principle of laser scanning three coordinate measuring machine is analyzed. The accuracy and reliability of the calibration system for 3D printing products are verified. According to the newly revised JJF 1064 Calibration specification for coordinate measuring machines [3], it is calibrated.

Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

2006 ◽  
Vol 505-507 ◽  
pp. 7-12 ◽  
Author(s):  
Gerd Jäger ◽  
T. Hausotte ◽  
Eberhard Manske ◽  
H.-J. Büchner ◽  
R. Mastylo ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Three Dimensional ◽  
Scanning Probe ◽  
Large Area ◽  
Circuit Testing ◽  
Measuring Range ◽  
Research Institutes ◽  
Scanning Force ◽  
Wide Scale ◽  
Tactile Probe

The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

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