Machine learning approach to thickness prediction from in situ spectroscopic ellipsometry data for atomic layer deposition processes

2022 ◽  
Vol 40 (1) ◽  
pp. 012405
Author(s):  
Ayush Arunachalam ◽  
S. Novia Berriel ◽  
Corbin Feit ◽  
Udit Kumar ◽  
Sudipta Seal ◽  
...  
Keyword(s):  
Machine Learning ◽  
Atomic Layer ◽  
Learning Approach ◽  
Layer Deposition ◽  
Machine Learning Approach ◽  
Thickness Prediction ◽  
Deposition Processes ◽  
Ellipsometry Data ◽  
Spectroscopic Ellipsometry Data

scholarly journals Elucidating the Evolving Atomic Structure in Atomic Layer Deposition Reactions with in Situ XANES and Machine Learning

2019 ◽  
Vol 31 (21) ◽  
pp. 8937-8947 ◽  
Author(s):  
Orlando Trejo ◽  
Anup L. Dadlani ◽  
Francisco De La Paz ◽  
Shinjita Acharya ◽  
Rob Kravec ◽  
...  
Keyword(s):  
Machine Learning ◽  
Atomic Layer Deposition ◽  
Atomic Structure ◽  
Atomic Layer ◽  
Layer Deposition ◽  
In Situ Xanes

Classification of different skarn deposits based on the compositional variability of associated grandite garnets: a data science and Machine Learning approach

2021 ◽  
Author(s):  
Urmi Ghosh ◽  
Tuhin Chakraborty
Keyword(s):  
Machine Learning ◽  
Trace Element ◽  
Data Science ◽  
Training Dataset ◽  
Support Vector ◽  
Learning Approach ◽  
Machine Learning Approach ◽  
Skarn Deposits

<p>Rapid technological improvements made in in-situ analysis techniques, including LA-ICPMS, have transformed the field of analytical geochemistry. This has a far-reaching impact for different petrogenetic and ore-genetic studies where minute major and trace element compositional changes between different mineral zones within a single crystal can now be demarcated. Minerals such as garnet although robust are quite sensitive to the changing P-T and fluid conditions during their formation. These minerals have become powerful tools to characterize mineralization types. Previously, Meinert (1992) has used in-situ major element EPMA analysis results to classify different skarn deposit based on the end-member composition of hydrothermal garnets. Alternatively, Tian et al. (2019) used the garnet trace element composition for the similar purpose. However, these discrimination plots/ classification schemes show major overlap in different skarn deposits, such as Fe, Cu, Zn, and Au. The present study is an attempt to use machine learning approach on available garnet data to found a more potent classification scheme for skarn deposits, thus reaffirming garnet as a faithful indicator for hydrothermal ore deposits. We have meticulously collected major and trace element data of Ca-rich garnets, associated with different skarn deposits worldwide from 40 publications. This collected data is then used to train a model for fingerprinting the skarn deposits. Stratified random sampling method has been used on the dataset with 80% of the samples as test set and the rest 20 % as training dataset. We have used K-nearest neighbour (KNN), Support Vector Machine (SVM) and Random Forest algorithms on the data by using Python as a platform. These ML classification algorithm performs better than the earlier existing models available for classification of ore types based on garnet composition in skarn system. Factor importance is calculated that shows which elements play a pivotal role in classification of the ore type. Our results depict that multiple garnet forming elements taken together can reliably be used to discriminate between different ore formation settings.</p>

scholarly journals Comparison of In-Situ Chlorophyll-a Time Series and Sentinel-3 Ocean and Land Color Instrument Data in Slovenian National Waters (Gulf of Trieste, Adriatic Sea)

Water ◽  
2021 ◽  
Vol 13 (14) ◽  
pp. 1903
Author(s):  
El Khalil Cherif ◽  
Patricija Mozetič ◽  
Janja Francé ◽  
Vesna Flander-Putrle ◽  
Jana Faganeli-Pucer ◽  
...  
Keyword(s):  
Machine Learning ◽  
Chlorophyll A ◽  
Satellite Data ◽  
Adriatic Sea ◽  
Global Ocean ◽  
Learning Approach ◽  
Chl A ◽  
Gulf Of Trieste ◽  
Machine Learning Approach

While satellite remote sensing of ocean color is a viable tool for estimating large-scale patterns of chlorophyll-a (Chl-a) and global ocean primary production, its application in coastal waters is limited by the complex optical properties. An exploratory study was conducted in the Gulf of Trieste (Adriatic Sea) to assess the usefulness of Sentinel-3 satellite data in the Slovenian national waters. OLCI (Ocean and Land Colour Instrument) Chl-a level 2 products (OC4Me and NN) were compared to monthly Chl-a in-situ measurements at fixed sites from 2017 to 2019. In addition, eight other methods for estimating Chl-a concentration based on reflectance in different spectral bands were tested (OC3M, OC4E, MedOC4, ADOC4, AD4, 3B-OLCI, 2B-OLCI and G2B). For some of these methods, calibration was performed on in-situ data to achieve a better agreement. Finally, L1-regularized regression and random forest were trained on the available dataset to test the capabilities of the machine learning approach. The results show rather poor performance of the two originally available products. The same is true for the other eight methods and the fits to the measured values also show only marginal improvement. The best results are obtained with the blue-green methods (OC3, OC4 and AD4), especially the AD4SI (a designated fit of AD4) with R = 0.56 and RMSE = 0.4 mg/m³, while the near infrared (NIR) methods show underwhelming performance. The machine learning approach can only explain 30% of the variability and the RMSE is of the same order as for the blue-green methods. We conclude that due to the low Chl-a concentration and the moderate turbidity of the seawater, the reflectance provided by the Sentinel-3 OLCI spectrometer carries little information about Chl-a in the Slovenian national waters within the Gulf of Trieste and is therefore of limited use for our purposes. This requires that we continue to improve satellite products for use in those marine waters that have not yet proven suitable. In this way, satellite data could be effectively integrated into a comprehensive network that would allow a reliable assessment of ecological status, taking into account environmental regulations.

scholarly journals Estimation of Surface NO2 Concentrations over Germany from TROPOMI Satellite Observations Using a Machine Learning Method

2021 ◽  
Vol 13 (5) ◽  
pp. 969
Author(s):  
Ka Lok Chan ◽  
Ehsan Khorsandi ◽  
Song Liu ◽  
Frank Baier ◽  
Pieter Valks
Keyword(s):  
Neural Network ◽  
Machine Learning ◽  
Network Model ◽  
Neural Network Model ◽  
Satellite Observations ◽  
Learning Approach ◽  
Annual Average ◽  
The Neural Network ◽  
Machine Learning Approach

In this paper, we present the estimation of surface NO2 concentrations over Germany using a machine learning approach. TROPOMI satellite observations of tropospheric NO2 vertical column densities (VCDs) and several meteorological parameters are used to train the neural network model for the prediction of surface NO2 concentrations. The neural network model is validated against ground-based in situ air quality monitoring network measurements and regional chemical transport model (CTM) simulations. Neural network estimation of surface NO2 concentrations show good agreement with in situ monitor data with Pearson correlation coefficient (R) of 0.80. The results also show that the machine learning approach is performing better than regional CTM simulations in predicting surface NO2 concentrations. We also performed a sensitivity analysis for each input parameter of the neural network model. The validated neural network model is then used to estimate surface NO2 concentrations over Germany from 2018 to 2020. Estimated surface NO2 concentrations are used to investigate the spatio-temporal characteristics, such as seasonal and weekly variations of NO2 in Germany. The estimated surface NO2 concentrations provide comprehensive information of NO2 spatial distribution which is very useful for exposure estimation. We estimated the annual average NO2 exposure for 2018, 2019 and 2020 is 15.53, 15.24 and 13.27 µµg/m3, respectively. While the annual average NO2 concentration of 2018, 2019 and 2020 is only 12.79, 12.60 and 11.15 µµg/m3. In addition, we used the surface NO2 data set to investigate the impacts of the coronavirus disease 2019 (COVID-19) pandemic on ambient NO2 levels in Germany. In general, 10–30% lower surface NO2 concentrations are observed in 2020 compared to 2018 and 2019, indicating the significant impacts of a series of restriction measures to reduce the spread of the virus.

scholarly journals A hybrid data–model approach to map soil thickness in mountain hillslopes

2021 ◽  
Vol 9 (5) ◽  
pp. 1347-1361
Author(s):  
Qina Yan ◽  
Haruko Wainwright ◽  
Baptiste Dafflon ◽  
Sebastian Uhlemann ◽  
Carl I. Steefel ◽  
...  
Keyword(s):  
Machine Learning ◽  
Hybrid Model ◽  
Spatial Resolution ◽  
Soil Layer ◽  
Learning Approach ◽  
Soil Thickness ◽  
Soil Erosion Rate ◽  
East River ◽  
Machine Learning Approach ◽  
Thickness Prediction

Abstract. Soil thickness plays a central role in the interactions between vegetation, soils, and topography, where it controls the retention and release of water, carbon, nitrogen, and metals. However, mapping soil thickness, here defined as the mobile regolith layer, at high spatial resolution remains challenging. Here, we develop a hybrid model that combines a process-based model and empirical relationships to estimate the spatial heterogeneity of soil thickness with fine spatial resolution (0.5 m). We apply this model to two aspects of hillslopes (southwest- and northeast-facing, respectively) in the East River watershed in Colorado. Two independent measurement methods – auger and cone penetrometer – are used to sample soil thickness at 78 locations to calibrate the local value of unconstrained parameters within the hybrid model. Sensitivity analysis using the hybrid model reveals that the diffusion coefficient used in hillslope diffusion modeling has the largest sensitivity among all input parameters. In addition, our results from both sampling and modeling show that, in general, the northeast-facing hillslope has a deeper soil layer than the southwest-facing hillslope. By comparing the soil thickness estimated between a machine-learning approach and this hybrid model, the hybrid model provides higher accuracy and requires less sampling data. Modeling results further reveal that the southwest-facing hillslope has a slightly faster surface soil erosion rate and soil production rate than the northeast-facing hillslope, which suggests that the relatively less dense vegetation cover and drier surface soils on the southwest-facing slopes influence soil properties. With seven parameters in total for calibration, this hybrid model can provide a realistic soil thickness map with a relatively small amount of sampling dataset comparing to machine-learning approach. Integrating process-based modeling and statistical analysis not only provides a thorough understanding of the fundamental mechanisms for soil thickness prediction but also integrates the strengths of both statistical approaches and process-based modeling approaches.

In Situ Reaction Mechanism Studies on the New tBuN=M(NEt2)3 -Water and tBuN=M(NEt2)3 - Ozone (M = Nb,Ta) Atomic Layer Deposition Processes

2012 ◽  
Vol 24 (9) ◽  
pp. 1555-1561 ◽  
Author(s):  
Yoann Tomczak ◽  
Kjell Knapas ◽  
Markku Sundberg ◽  
Markku Leskelä ◽  
Mikko Ritala
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Reaction ◽  
Layer Deposition ◽  
Deposition Processes
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