Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser

Vineeth Sasidharan; Alexander Neumann; S. R. J. Brueck

doi:10.1116/6.0001377

Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001377 ◽

2021 ◽

Vol 39 (6) ◽

pp. 062603

Author(s):

Vineeth Sasidharan ◽

Alexander Neumann ◽

S. R. J. Brueck

Keyword(s):

Diode Laser ◽

Diffraction Grating ◽

Beam Splitter ◽

Interferometric Lithography

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Frequency stabilization of a diode laser using simultaneous optical feedback from a diffraction grating and a narrowband Fabry–Perot cavity

Collected Papers of Carl Wieman ◽

10.1142/9789812813787_0111 ◽

2008 ◽

pp. 792-794

Author(s):

H. Patrick ◽

C. E. Wieman

Keyword(s):

Diode Laser ◽

Diffraction Grating ◽

Optical Feedback ◽

Frequency Stabilization ◽

Fabry Perot

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Diffraction grating polarization beam splitter using nano optical slits

Optical and Quantum Electronics ◽

10.1007/s11082-015-0251-x ◽

2015 ◽

Vol 47 (12) ◽

pp. 3837-3845 ◽

Cited By ~ 2

Author(s):

Ismail M. Nassar ◽

Diaa Khalil

Keyword(s):

Diffraction Grating ◽

Beam Splitter ◽

Polarization Beam Splitter

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External-cavity diode laser using a grazing-incidence diffraction grating

Optics Letters ◽

10.1364/ol.16.000910 ◽

1991 ◽

Vol 16 (12) ◽

pp. 910 ◽

Cited By ~ 164

Author(s):

K. C. Harvey ◽

C. J. Myatt

Keyword(s):

Diode Laser ◽

Diffraction Grating ◽

External Cavity ◽

Grazing Incidence ◽

External Cavity Diode Laser ◽

Grazing Incidence Diffraction

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Polarizing binary diffraction grating beam splitter

Optics Letters ◽

10.1364/ol.29.001443 ◽

2004 ◽

Vol 29 (13) ◽

pp. 1443 ◽

Cited By ~ 9

Author(s):

Jeffrey A. Davis ◽

Garrett H. Evans

Keyword(s):

Diffraction Grating ◽

Beam Splitter

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Frequency stabilization of a diode laser using simultaneous optical feedback from a diffraction grating and a narrowband Fabry–Perot cavity

Review of Scientific Instruments ◽

10.1063/1.1142236 ◽

1991 ◽

Vol 62 (11) ◽

pp. 2593-2595 ◽

Cited By ~ 29

Author(s):

H. Patrick ◽

C. E. Wieman

Keyword(s):

Diode Laser ◽

Diffraction Grating ◽

Optical Feedback ◽

Frequency Stabilization ◽

Fabry Perot

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A diffraction grating optical beam splitter for a working standard of mean laser emission power

Measurement Techniques ◽

10.1007/bf00977851 ◽

1993 ◽

Vol 36 (2) ◽

pp. 176-179 ◽

Cited By ~ 2

Author(s):

S. A. Kaufman ◽

A. A. Liberman ◽

E. M. Yankevich

Keyword(s):

Diffraction Grating ◽

Laser Emission ◽

Beam Splitter ◽

Optical Beam ◽

Emission Power ◽

Working Standard ◽

Laser Emission Power

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EUV interferometric lithography and structural characterization of an EUV diffraction grating with nondestructive spectroscopic ellipsometry

Microelectronic Engineering ◽

10.1016/j.mee.2011.02.002 ◽

2011 ◽

Vol 88 (8) ◽

pp. 2639-2643 ◽

Cited By ~ 11

Author(s):

Chun-Hung Lin ◽

Chi-Hao Fong ◽

Yi-Ming Lin ◽

Yin-Yu Lee ◽

Hok-Sum Fung ◽

...

Keyword(s):

Spectroscopic Ellipsometry ◽

Structural Characterization ◽

Diffraction Grating ◽

Interferometric Lithography

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Polarization-selective beam splitter based on a highly efficient simple binary diffraction grating

Applied Optics ◽

10.1364/ao.43.006157 ◽

2004 ◽

Vol 43 (33) ◽

pp. 6157 ◽

Cited By ~ 28

Author(s):

Danaë Delbeke ◽

Roel Baets ◽

Peter Muys

Keyword(s):

Diffraction Grating ◽

Beam Splitter ◽

Highly Efficient

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Single-Mode Operation of Broad-Area Diode Laser at 670 nm by External Cavity Configuration with a Diffraction Grating

Optical Review ◽

10.1007/s10043-000-0573-0 ◽

2000 ◽

Vol 7 (6) ◽

pp. 573-575

Author(s):

Shunichi Sato ◽

Rui Takada ◽

Humio Inaba

Keyword(s):

Diode Laser ◽

Diffraction Grating ◽

External Cavity ◽

Single Mode ◽

Broad Area ◽

Single Mode Operation ◽

Mode Operation ◽

Cavity Configuration

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Interpretable and Efficient Interferometric Contrast in Scanning Transmission Electron Microscopy with a Diffraction-Grating Beam Splitter

Physical Review Applied ◽

10.1103/physrevapplied.10.061001 ◽

2018 ◽

Vol 10 (6) ◽

Cited By ~ 11

Author(s):

Tyler R. Harvey ◽

Fehmi S. Yasin ◽

Jordan J. Chess ◽

Jordan S. Pierce ◽

Roberto M. S. dos Reis ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Diffraction Grating ◽

Scanning Transmission Electron Microscopy ◽

Beam Splitter ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission

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