Modeling the effect of stochastic heating and surface chemistry in a pure CF4 inductively coupled plasma
2021 ◽
Vol 39
(6)
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pp. 062204
Keyword(s):
2007 ◽
Vol 46
(8A)
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pp. 5297-5303
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2019 ◽
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2010 ◽
Vol 14
(1-2)
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pp. 119-127
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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1999 ◽
Vol 3
(2-3)
◽
pp. 263-267
Keyword(s):
2017 ◽
Vol 9
(5)
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