Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide

2020 ◽  
Vol 38 (6) ◽  
pp. 064002
Author(s):  
Carsten Bundesmann ◽  
Anke Hellmich
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Energy Distributions ◽  
Secondary Ions ◽  
Beam Sputtering

Ultraflat indium tin oxide films prepared by ion beam sputtering

2005 ◽  
Vol 473 (2) ◽  
pp. 218-223 ◽  
Author(s):  
Younggun Han ◽  
Donghwan Kim ◽  
Jun-Sik Cho ◽  
Seok-Keun Koh
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Tin Oxide Films

In situ electrical and mechanical study of Indium Tin Oxide films deposited on polyimide substrate by Xe ion beam sputtering

2022 ◽  
Vol 741 ◽  
pp. 139035
Author(s):  
T. Chommaux ◽  
P.O. Renault ◽  
D. Thiaudière ◽  
P. Godard ◽  
F. Paumier ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Polyimide Substrate ◽  
Mechanical Study ◽  
Beam Sputtering ◽  
Tin Oxide Films

Effects of annealing on the properties of indium–tin oxide films prepared by ion beam sputtering

2005 ◽  
Vol 192 (1) ◽  
pp. 106-111 ◽  
Author(s):  
Ding-Fwu Lii ◽  
Jow-Lay Huang ◽  
Iau-Jiue Jen ◽  
Su-Shia Lin ◽  
Pavol Sajgalik
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Tin Oxide Films

Properties of indium oxide/tin oxide multilayered films prepared by ion-beam sputtering

1988 ◽  
Vol 23 (8) ◽  
pp. 3026-3030 ◽  
Author(s):  
Takeyuki Suzuki ◽  
Tsutomu Yamazaki ◽  
Harunobu Oda
Keyword(s):  
Indium Oxide ◽  
Tin Oxide ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Multilayered Films ◽  
Beam Sputtering

Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam

1999 ◽  
Vol 112 (1-3) ◽  
pp. 267-270 ◽  
Author(s):  
Yong-Sahm Choe ◽  
Jae-Ho Chung ◽  
Dae-Seung Kim ◽  
Hong Koo Baik
Keyword(s):  
Tin Oxide ◽  
Ion Beam ◽  
Oxide Films ◽  
Ion Beam Sputtering ◽  
Oxygen Ion ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Tin Oxide Films
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