Effect of oxygen plasma exposure of porous spin-on-glass films
2000 ◽
Vol 18
(3)
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pp. 1276
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2014 ◽
Vol 896
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pp. 510-513
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2011 ◽
Vol 22
(12)
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pp. 1426-1432
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2011 ◽
Vol 13
(2)
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pp. 025008
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2011 ◽
Vol 11
(11)
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pp. 3031-3035
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2010 ◽
Vol 114
(46)
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pp. 14854-14859
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2018 ◽
Vol 65
(4)
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pp. 207-210
2013 ◽
Vol 1
(40)
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pp. 6613
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2017 ◽
Vol 724
◽
pp. 348-352
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2020 ◽
Vol 38
(1)
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pp. 012804
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