High-resolution two-dimensional dopant characterization using secondary ion mass spectrometry

Author(s):  
V. A. Ukraintsev ◽  
P. J. Chen ◽  
J. T. Gray ◽  
C. F. Machala ◽  
L. K. Magel ◽  
...  
2008 ◽  
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pp. 5986-5992 ◽  
Author(s):  
Sutapa Ghosal ◽  
Stewart J. Fallon ◽  
Terrance J. Leighton ◽  
Katherine E. Wheeler ◽  
Michael J. Kristo ◽  
...  

2014 ◽  
Vol 59 (2) ◽  
pp. 173-180 ◽  
Author(s):  
Bianca Kyriacou ◽  
Katie L. Moore ◽  
David Paterson ◽  
Martin D. de Jonge ◽  
Daryl L. Howard ◽  
...  

1999 ◽  
Vol 82 (4) ◽  
pp. 1001-1008 ◽  
Author(s):  
Konstantin L. Gavrilov ◽  
Stephen J. Bennison ◽  
Kurt R. Mikeska ◽  
Jan M. Chabala ◽  
Riccardo Levi-Setti

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