Solid-state modulators for plasma immersion ion implantation applications

Marcel P. J. Gaudreau, P. E.; Jeffrey A. Casey; Michael A. Kempkes; Timothy J. Hawkey; James M. Mulvaney

doi:10.1116/1.590657

Solid-state modulators for plasma immersion ion implantation applications

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590657 ◽

1999 ◽

Vol 17 (2) ◽

pp. 888 ◽

Cited By ~ 19

Author(s):

Marcel P. J. Gaudreau, P. E. ◽

Jeffrey A. Casey ◽

Michael A. Kempkes ◽

Timothy J. Hawkey ◽

James M. Mulvaney

Keyword(s):

Solid State ◽

Ion Implantation ◽

Plasma Immersion Ion Implantation

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An All Solid-State Pulsed Power Generator for Plasma Immersion Ion Implantation (PIII)

Plasma Science and Technology ◽

10.1088/1009-0630/11/2/17 ◽

2009 ◽

Vol 11 (2) ◽

pp. 220-224 ◽

Cited By ~ 1

Author(s):

Liu Kefu ◽

Qiu Jian ◽

Wu Yifan

Keyword(s):

Solid State ◽

Ion Implantation ◽

Pulsed Power ◽

Power Generator ◽

Plasma Immersion Ion Implantation ◽

Pulsed Power Generator

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Special 10kV solid state power modulator for plasma immersion ion implantation treatment of industrial bearings

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961184 ◽

2002 ◽

Author(s):

B.Y. Tang ◽

L.P. Wang ◽

P.K. Chu ◽

K.Y. Gan ◽

X.F. Wang ◽

...

Keyword(s):

Solid State ◽

Ion Implantation ◽

State Power ◽

Plasma Immersion Ion Implantation

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Solid state pulsed power systems for plasma immersion ion implantation

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) ◽

10.1109/iit.2000.924196 ◽

2003 ◽

Author(s):

M.P.J. Gaudreau ◽

J.A. Casey ◽

M.A. Kempkes ◽

J.M. Mulvaney ◽

T.J. Hawkey

Keyword(s):

Solid State ◽

Ion Implantation ◽

Power Systems ◽

Pulsed Power ◽

Plasma Immersion Ion Implantation

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Non-conventional high voltage pulsers for advanced plasma immersion ion implantation

10.1063/1.1374892 ◽

2001 ◽

Cited By ~ 2

Author(s):

J. O. Rossi

Keyword(s):

Ion Implantation ◽

High Voltage ◽

Plasma Immersion Ion Implantation

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The effect of plasma immersion ion implantation of Ne+ or Ar+ or Kr+ on the forming voltage of the resistive switching in the structure Ni/Pt/HfO2(10nm)/TaN(5nm)/TiN

Journal of Physics Conference Series ◽

10.1088/1742-6596/1695/1/012009 ◽

2020 ◽

Vol 1695 ◽

pp. 012009

Author(s):

O O Permyakova ◽

A V Miakonkikh ◽

K V Rudenko ◽

A E Rogozhin

Keyword(s):

Ion Implantation ◽

Resistive Switching ◽

Plasma Immersion Ion Implantation

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Correction to “Sub-5 nm Nanodiamonds Fabricated by Plasma Immersion Ion Implantation as Fluorescent Probes”

ACS Applied Nano Materials ◽

10.1021/acsanm.1c01684 ◽

2021 ◽

Author(s):

Sung Ju Han ◽

Min Seo ◽

Min Gyeong Cho ◽

Young-Wan Kwon ◽

Sang-Ho Lim ◽

...

Keyword(s):

Ion Implantation ◽

Fluorescent Probes ◽

Plasma Immersion Ion Implantation

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TiN/ZrO2 multilayers synthesized on GCr15 bearing steel using plasma immersion ion implantation and deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.09.120 ◽

2007 ◽

Vol 201 (15) ◽

pp. 6615-6618 ◽

Cited By ~ 14

Author(s):

Tao Sun ◽

Langping Wang ◽

Yonghao Yu ◽

Yuhang Wang ◽

Xiaofeng Wang ◽

...

Keyword(s):

Ion Implantation ◽

Bearing Steel ◽

Gcr15 Bearing Steel ◽

Plasma Immersion Ion Implantation

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Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677723 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation

International Journal of Heat and Mass Transfer ◽

10.1016/j.ijheatmasstransfer.2006.08.019 ◽

2007 ◽

Vol 50 (5-6) ◽

pp. 789-798 ◽

Cited By ~ 2

Author(s):

F.B. Yeh

Keyword(s):

Ion Implantation ◽

Analytical Method ◽

Plasma Immersion Ion Implantation

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A hard-tube pulser of 60 kV, 10 A for experiment and modeling in plasma immersion ion implantation

IEEE Transactions on Plasma Science ◽

10.1109/27.901204 ◽

2000 ◽

Vol 28 (5) ◽

pp. 1392-1396 ◽

Cited By ~ 10

Author(s):

J.O. Rossi ◽

M. Ueda ◽

J.J. Barroso ◽

V.A. Spassov

Keyword(s):

Ion Implantation ◽

Plasma Immersion Ion Implantation

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