High-accuracy interferometry of extreme ultraviolet lithographic optical systems

Author(s):  
Kenneth A. Goldberg
2000 ◽  
Vol 39 (17) ◽  
pp. 2941 ◽  
Author(s):  
Patrick Naulleau ◽  
Kenneth A. Goldberg ◽  
Eric M. Gullikson ◽  
Jeffrey Bokor

1994 ◽  
Vol 144 ◽  
pp. 619-624 ◽  
Author(s):  
K. Wilhelm ◽  
W. Curdt ◽  
A. H. Gabriel ◽  
M. Grewing ◽  
M. C. E. Huber ◽  
...  

AbstractThe experiment Solar Ultraviolet Measurements of Emitted Radiation (SUMER) is designed for the investigations of plasma flow characteristics, turbulence and wave motions, plasma densities and temperatures, structures and events associated with solar magnetic activity in the chromosphere, the transition zone and the corona. Specifically, SUMER will measure profiles and intensities of extreme ultraviolet (EUV) lines emitted in the solar atmosphere ranging from the upper chromosphere to the lower corona; determine line broadenings, spectral positions and Doppler shifts with high accuracy; provide stigmatic images of selected areas of the Sun in the EUV with high spatial, temporal and spectral resolution and obtain full images of the Sun and the inner corona in selectable EUV lines, corresponding to a temperature range from 104to more than 1.8 x 106K. The spatial and spectral resolution capabilities of the instrument will be considered in this contribution in some detail, and a new detector concept will be introduced.


1994 ◽  
Vol 159 ◽  
pp. 322-322
Author(s):  
A. Fruscione ◽  
C.S. Bowyer ◽  
T.E. Carone ◽  
S.M. Kahn ◽  
A. Königl ◽  
...  

We have studied the first extreme ultraviolet spectroscopic data and a high accuracy light curve for the BL Lac object PKS 2155–304 observed with the Extreme Ultraviolet Explorer (EUVE) on July 21–22, 1992. This target was observed with the Deep Survey Spectrometer telescope for approximateley 30,000 sec during the in-orbit-calibration phase of the mission, allowing to obtain simultaneous image and spectrum.


2019 ◽  
Vol 215 ◽  
pp. 09002
Author(s):  
Aleksandr Semenov ◽  
Magomed Abdulkadyrov ◽  
Nikolay Dobrikov ◽  
Aleksandr Ignatov ◽  
Vladimir Patrikeev ◽  
...  

JSC LZOS successfully applies Computer Generated Holograms (CGH) for testing of on- and off-axis surfaces of large-dimensioned optical components for their alignment with respect to interferometer, for defining of aspherical surface optical vertex position with respect to the geometrical center and for optical systems alignment. All this allows producing of large-dimensioned aspherical on- and off-axis astronomical and space mirrors with high accuracy.


2021 ◽  
Vol 28 (3) ◽  
Author(s):  
P. Wojda ◽  
S. Kshevetskii ◽  
I. Lyatun

A mathematical apparatus for solving problems of X-ray wave propagation through complex optical systems, when the lens thickness can change with jumps, is developed and presented. The developed method is based on the use of the superposition of oriented Gaussian beams, which satisfy the Helmholtz equation with high accuracy. The wave propagation in air and through kinoform and ordinary lenses is considered. Focusing and imaging properties are compared for both types of X-ray optics. The diffraction effects arising due to thickness jumps in the kinoform lenses and the influence of these jumps on the X-ray focusing and imaging are investigated. The prospect of using the developed theory for X-ray optics applications is discussed.


2018 ◽  
Vol 57 (18) ◽  
pp. 5217 ◽  
Author(s):  
Guoqing Yang ◽  
Liang Miao ◽  
Xin Zhang ◽  
Chuang Sun ◽  
Yanfeng Qiao

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