Real-time Fourier transform infrared spectroscopy study of the kinetics of acid-catalyzed negative-tone resists based on hexamethoxymethylmelamine and phenolic resins
1998 ◽
Vol 16
(6)
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pp. 3759
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2003 ◽
Vol 90
(9)
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pp. 2485-2499
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2016 ◽
Vol 409
(3)
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pp. 833-839
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2009 ◽
Vol 9
(2)
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pp. 1483-1486
2005 ◽
Vol 81
(12)
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pp. 911-918
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2004 ◽
Vol 42
(8)
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pp. 2010-2018
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