Kinetics of Si growth by an electron-beam-irradiation technique using a Si[sub 2]H[sub 6] source
1998 ◽
Vol 16
(6)
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pp. 3364
2011 ◽
Vol 80
(12)
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pp. 1441-1447
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1980 ◽
Vol 84
(3)
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pp. 247-250
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1996 ◽
Vol 54
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pp. 454-455
Keyword(s):
Keyword(s):
2019 ◽
Vol 139
(10)
◽
pp. 435-436
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