scholarly journals Interface formation and thermal stability of advanced metal gate and ultrathin gate dielectric layers

1998 ◽  
Vol 16 (4) ◽  
pp. 2154 ◽  
Author(s):  
B. Claflin
Keyword(s):  
Thermal Stability ◽  
Gate Dielectric ◽  
Interface Formation ◽  
Metal Gate ◽  
Dielectric Layers ◽  
Thermal Stability Of

Improved thermal stability of ruthenium oxide metal gate electrode on hafnium oxide gate dielectric

2007 ◽  
Vol 91 (3) ◽  
pp. 033512 ◽  
Author(s):  
Musarrat Hasan ◽  
Hokyung Park ◽  
Joon-myong Lee ◽  
Hyunsang Hwang
Keyword(s):  
Thermal Stability ◽  
Hafnium Oxide ◽  
Gate Dielectric ◽  
Ruthenium Oxide ◽  
Gate Electrode ◽  
Metal Gate ◽  
Thermal Stability Of

Experimental observations of the thermal stability of high-k gate dielectric materials on silicon

2002 ◽  
Vol 303 (1) ◽  
pp. 54-63 ◽  
Author(s):  
P.S. Lysaght ◽  
P.J. Chen ◽  
R. Bergmann ◽  
T. Messina ◽  
R.W. Murto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Gate Dielectric ◽  
Dielectric Materials ◽  
High K ◽  
Thermal Stability Of ◽  
High K Gate Dielectric

Improved thermal stability of Al2O3/HfO2/Al2O3 high-k gate dielectric stack on GaAs

2010 ◽  
Vol 96 (14) ◽  
pp. 142112 ◽  
Author(s):  
Dong Chan Suh ◽  
Young Dae Cho ◽  
Sun Wook Kim ◽  
Dae-Hong Ko ◽  
Yongshik Lee ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Gate Dielectric ◽  
High K ◽  
Thermal Stability Of ◽  
High K Gate Dielectric

Work function and thermal stability of Ti1−xAlxNy for dual metal gate electrodes

2002 ◽  
Vol 81 (22) ◽  
pp. 4192-4194 ◽  
Author(s):  
Tae-Ho Cha ◽  
Dae-Gyu Park ◽  
Tae-Kyun Kim ◽  
Se-Aug Jang ◽  
In-Seok Yeo ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Work Function ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes ◽  
Dual Metal ◽  
Thermal Stability Of

Thermal stability of Hf/sub x/Ta/sub y/N metal gate electrodes for advanced MOS devices

2006 ◽  
Vol 27 (3) ◽  
pp. 148-150 ◽  
Author(s):  
Chin-Lung Cheng ◽  
Kuei-Shu Chang-Liao ◽  
Tzu-Chen Wang ◽  
Tien-Ko Wang ◽  
Howard Chih-Hao Wang
Keyword(s):  
Thermal Stability ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes ◽  
Mos Devices ◽  
Thermal Stability Of

Thermal Stability of Sputtered TiN as Metal Gate on 4H-SiC

1998 ◽  
Vol 264-268 ◽  
pp. 805-808 ◽  
Author(s):  
Erik Danielsson ◽  
Chris I. Harris ◽  
Carl Mikael Zetterling ◽  
Mikael Östling
Keyword(s):  
Thermal Stability ◽  
Metal Gate ◽  
Thermal Stability Of

Characterization of the electronic structure and thermal stability of HfO2 /SiO2 /Si gate dielectric stack

2017 ◽  
Vol 49 (8) ◽  
pp. 776-780
Author(s):  
T. L. Duan ◽  
L. Pan ◽  
Z. Zhang ◽  
E. S. Tok ◽  
J. S. Pan
Keyword(s):  
Thermal Stability ◽  
Electronic Structure ◽  
Gate Dielectric ◽  
Thermal Stability Of

Effect of Al Incorporation in the Thermal Stability of Atomic-Layer-Deposited HfO[sub 2] for Gate Dielectric Applications

2007 ◽  
Vol 154 (4) ◽  
pp. G99 ◽  
Author(s):  
Yan-Kai Chiou ◽  
Che-Hao Chang ◽  
Chen-Chan Wang ◽  
Kun-Yu Lee ◽  
Tai-Bor Wu ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Gate Dielectric ◽  
Atomic Layer ◽  
Thermal Stability Of
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