Fabrication of metal field emitter arrays for low voltage and high current operation

Author(s):  
Chang Woo Oh
1994 ◽  
Vol 349 ◽  
Author(s):  
B. H. Fishbine ◽  
C. J. Miglionico ◽  
K. E. Hackett ◽  
K. J. Hendricks

ABSTRACTBuckytubes are considered for high current density cold field emitter array electron sources. They may provide more stable, higher-brightness emission than existing cold field emitter arrays.


2019 ◽  
Vol 484 ◽  
pp. 966-974 ◽  
Author(s):  
Libin Wang ◽  
Yangyang Zhao ◽  
Keshuang Zheng ◽  
Juncong She ◽  
Shaozhi Deng ◽  
...  

2006 ◽  
Vol 965 ◽  
Author(s):  
Ken-ichi Nakayama ◽  
Masaaki Yokoyama

ABSTRACTThe on/off ratio of the vertical-type metal-base organic transistors was drastically improved by heat treatment in air. The heat treatment after deposition of the collector layer and base electrode reduced the leakage current between the base and collector, resulting in remarkable suppression of the off current. As a result, in addition to the advantage of low voltage and high current operation based on the vertical structure, very high on/off ratio exceeding 105 was achieved.


Author(s):  
Jiang Liu ◽  
John J. Hren

Arrays of nanometer-scale field emitters have recently become attractive candidates for device applications where high frequency and high current are desirable attributes. High emission current can be obtained from densely packed Spindt-type emitter arrays with very low extraction voltage. Concern with the optimum geometrical shape of each emitter and the fraction of active emitters, makes a combined study of field emission and scanning electron microscopy especially useful.Several geometrical structures, as well as several materials, have been used to fabricate the field emitter arrays. The present study concentrates on silicon-base emitters fabricated at the Microelectronics Center of North Carolina (MCNC). Each emitter has a pyramidal structure, fabricated by anisotropic chemical etching of highly doped (ND = 1017 cm−3) n-type silicon. Figure 1 shows a SEM micrograph of a typical Si field emitter with a radius of curvature less than 30 nm. The field required for electron emission, about 3 × 107 V/cm, is created by a relatively low voltage applied to the extraction gate, a metal film less than one micron distant and deposited over a dielectric layer of silicon oxide (Figures 2 and 3).


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