Design and characterization of a high numerical aperture lens system for scanned laser lithography

Author(s):  
P. C. Allen
2020 ◽  
Vol 59 (12) ◽  
pp. 3601
Author(s):  
Jeremy Béguelin ◽  
Michael Symeonidis ◽  
Wilfried Noell ◽  
Reinhard Voelkel ◽  
Toralf Scharf

1993 ◽  
Vol 18 (4) ◽  
pp. 305 ◽  
Author(s):  
S. M. Mansfield ◽  
W. R. Studenmund ◽  
G. S. Kino ◽  
K. Osato

2010 ◽  
Vol 5 (8) ◽  
pp. 302-302
Author(s):  
H. Zwick ◽  
B. Stuck ◽  
P. Edsall ◽  
E. Wood ◽  
R. Cheramie ◽  
...  

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