Equipment simulation of SiGe heteroepitaxy: Model validation by ab initio calculations of surface diffusion processes

1997 ◽  
Vol 15 (4) ◽  
pp. 935 ◽  
Author(s):  
M. Hierlemann
Keyword(s):  
Ab Initio Calculations ◽  
Ab Initio ◽  
Surface Diffusion ◽  
Model Validation ◽  
Diffusion Processes ◽  
Surface Diffusion Processes

Effect of step-step separation on surface diffusion processes

2006 ◽  
Vol 73 (12) ◽  
Author(s):  
Sondan Durukanoğlu ◽  
Oleg S. Trushin ◽  
Talat S. Rahman
Keyword(s):  
Surface Diffusion ◽  
Diffusion Processes ◽  
Step Step ◽  
Surface Diffusion Processes
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