1 μm range comparative length measurement using a regular crystalline lattice and a dual tunneling unit scanning tunneling microscope

Masato Aketagawa

doi:10.1116/1.589294

1 μm range comparative length measurement using a regular crystalline lattice and a dual tunneling unit scanning tunneling microscope

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589294 ◽

1997 ◽

Vol 15 (3) ◽

pp. 574 ◽

Cited By ~ 3

Author(s):

Masato Aketagawa

Keyword(s):

Scanning Tunneling Microscope ◽

Length Measurement ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Tunneling Microscope

Download Full-text

Dual tunneling-unit scanning tunneling microscope for length measurement based on crystalline lattice

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589245 ◽

1997 ◽

Vol 15 (1) ◽

pp. 174 ◽

Cited By ~ 11

Author(s):

Haijun Zhang

Keyword(s):

Scanning Tunneling Microscope ◽

Length Measurement ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Tunneling Microscope

Download Full-text

A two-dimensional atom encoder using one lateral-dithered scanning tunneling microscope (STM) tip and a regular crystalline lattice

Measurement Science and Technology ◽

10.1088/0957-0233/20/8/084006 ◽

2009 ◽

Vol 20 (8) ◽

pp. 084006 ◽

Cited By ~ 6

Author(s):

Patamaporn Chaikool ◽

Masato Aketagawa ◽

Eiki Okuyama

Keyword(s):

Scanning Tunneling Microscope ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Two Dimensional ◽

Tunneling Microscope

Download Full-text

Dual unit scanning tunneling microscope-atomic force microscope for length measurement based on reference scales

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589408 ◽

1997 ◽

Vol 15 (4) ◽

pp. 780 ◽

Cited By ~ 6

Author(s):

Haijun Zhang

Keyword(s):

Atomic Force Microscope ◽

Scanning Tunneling Microscope ◽

Length Measurement ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Atomic Force

Download Full-text

120 Stabilized Technique for Tracking Control of the Scanning Tunneling Microscope Tip by Referring Regular Crystalline Lattice

Proceedings of International Conference on Leading Edge Manufacturing in 21st century LEM21 ◽

10.1299/jsmelem.2003.101 ◽

2003 ◽

Vol 2003 (0) ◽

pp. 101-105

Author(s):

P. Rerkkumsup ◽

M. Aketagawa ◽

K. Takada ◽

Y. Togawa ◽

N. T. Thinh ◽

...

Keyword(s):

Scanning Tunneling Microscope ◽

Tracking Control ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Tunneling Microscope

Download Full-text

Comparison measurement in the hundred nanometer range with a crystalline lattice using a dual tunneling-unit scanning tunneling microscope

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587262 ◽

1994 ◽

Vol 12 (3) ◽

pp. 1681 ◽

Cited By ~ 7

Author(s):

Hideki Kawakatsu

Keyword(s):

Scanning Tunneling Microscope ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Nanometer Range ◽

Tunneling Microscope ◽

Comparison Measurement

Download Full-text

Step height measurement using a scanning tunneling microscope equipped with a crystalline lattice reference and interferometer

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587912 ◽

1995 ◽

Vol 13 (3) ◽

pp. 1112 ◽

Cited By ~ 5

Author(s):

Toru Fujii

Keyword(s):

Scanning Tunneling Microscope ◽

Step Height ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Height Measurement ◽

Tunneling Microscope

Download Full-text

Crystalline lattice for metrological applications and positioning control by a dual tunneling-unit scanning tunneling microscope

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585479 ◽

1991 ◽

Vol 9 (2) ◽

pp. 651 ◽

Cited By ~ 19

Author(s):

Hideki Kawakatsu

Keyword(s):

Scanning Tunneling Microscope ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Positioning Control ◽

Tunneling Microscope

Download Full-text

Dual unit scanning tunneling microscope-atomic force microscope for length measurement based on reference scales

Computer Standards & Interfaces ◽

10.1016/s0920-5489(99)92306-1 ◽

1999 ◽

Vol 21 (2) ◽

pp. 200

Author(s):

Haijun Zhang ◽

Feng Huang ◽

Toshiro Higuchi

Keyword(s):

Atomic Force Microscope ◽

Scanning Tunneling Microscope ◽

Length Measurement ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Atomic Force

Download Full-text

Two Dimensional Displacement Encoder using Multi Tunneling Probe Scanning Tunneling Microscope and Regular Crystalline Lattice

Journal of the Japan Society for Precision Engineering Contributed Papers ◽

10.2493/jspe.71.1442 ◽

2005 ◽

Vol 71 (11) ◽

pp. 1442-1447

Author(s):

Hiroshi HONDA ◽

Masato AKETAGAWA ◽

Masashi ISHIGE ◽

Patamaporn CHAIKOOL

Keyword(s):

Scanning Tunneling Microscope ◽

Crystalline Lattice ◽

Scanning Tunneling ◽

Two Dimensional ◽

Tunneling Microscope

Download Full-text

Dual tunneling-unit scanning tunneling microscope for practical length measurement based on reference scales

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1319696 ◽

2000 ◽

Vol 18 (6) ◽

pp. 2684 ◽

Cited By ~ 2

Author(s):

Haijun Zhang ◽

Lan Wu ◽

Feng Huang ◽

Shuwen Cheng

Keyword(s):

Scanning Tunneling Microscope ◽

Length Measurement ◽

Scanning Tunneling ◽

Tunneling Microscope

Download Full-text