Application of time-resolved scanning electron microscopy to the analysis of the motion of micromechanical structures

Abstract Electron Beam Induced Current is a powerful tool for Scanning Electron Microscopy (SEM) imaging mode. In this paper, the history and evolution of this technique are discussed. Some important defects are presented as well as their technological interpretation. A new custom amplifier is presented and its implementation in Time Resolved EBIC (TREBIC) is also proposed, the main differences with EBIC are pointed out.

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Time-resolved scanning electron microscopy with polarization analysis

Applied Physics Letters ◽

10.1063/1.4945053 ◽

2016 ◽

Vol 108 (14) ◽

pp. 142401 ◽

Cited By ~ 13

Author(s):

Robert Frömter ◽

Fabian Kloodt ◽

Stefan Rößler ◽

Axel Frauen ◽

Philipp Staeck ◽

...

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Polarization Analysis ◽

Time Resolved ◽

Scanning Electron

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Thermal- and acoustic-wave techniques in scanning electron microscopy

Canadian Journal of Physics ◽

10.1139/p86-216 ◽

1986 ◽

Vol 64 (9) ◽

pp. 1238-1246 ◽

Cited By ~ 14

Author(s):

Ludwig Josef Balk

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Electron Beam ◽

Acoustic Wave ◽

Three Dimensional ◽

Acoustic Microscopy ◽

Wave Form ◽

Time Resolved ◽

In Situ Experiments ◽

Scanning Electron

Since their introduction in 1980, thermal- and acoustic-wave techniques utilizing electron-beam excitation, denoted in the following as scanning electron acoustic microscopy (SEAM), have developed to include methods in the realm of scanning electron microscopy (SEM), giving additional and important information on material parameters compared with other SEM techniques. However, the SEAM method still has shortcomings, both theoretically and experimentally. New theories have to consider various principal sound-generation mechanisms, especially for semiconductors, ceramics, and ferromagnets. Furthermore, they must include three-dimensional and time-resolved calculations. From experimental evidence there is obviously the need for additional consideration of nonlinear signal generation. The theoretical discussion has to be supported by experiments; both phase analysis of the SEAM signal with respect to the electron-beam wave form and evaluation of the temporal SEAM behaviour are important for revealing information about the specimen. With special detectors, in situ experiments can be carried out for varying process parameters, as shown for the investigation of steel sheets. The SEAM performance has to be compared to other SEM modes by simultaneous experiments, especially for applications to semiconductors. Finally, extension to gigahertz frequencies and use of tomographic methods should increase the importance of SEAM in future.

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Formate modulated solvothermal synthesis of ZIF-8 investigated using time-resolved in situ X-ray diffraction and scanning electron microscopy

CrystEngComm ◽

10.1039/c1ce06002c ◽

2012 ◽

Vol 14 (2) ◽

pp. 492-498 ◽

Cited By ~ 196

Author(s):

Janosch Cravillon ◽

Christian A. Schröder ◽

Helge Bux ◽

André Rothkirch ◽

Jürgen Caro ◽

...

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Solvothermal Synthesis ◽

X Ray Diffraction ◽

Time Resolved ◽

X Ray ◽

Scanning Electron

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Pathogenesis of Human Hair Defects

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010005007x ◽

1974 ◽

Vol 32 ◽

pp. 12-13

Author(s):

P.S. Porter ◽

T. Aoyagi ◽

R. Matta

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Human Hair ◽

Standard Techniques ◽

Scanning Electron

Using standard techniques of scanning electron microscopy (SEM), over 1000 human hair defects have been studied. In several of the defects, the pathogenesis of the abnormality has been clarified using these techniques. It is the purpose of this paper to present several distinct morphologic abnormalities of hair and to discuss their pathogenesis as elucidated through techniques of scanning electron microscopy.

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