Low resistivity Al–RE (RE=La, Pr, and Nd) alloy thin films with high thermal stability for thin-film-transistor interconnects

1996 ◽  
Vol 14 (5) ◽  
pp. 3257 ◽  
Author(s):  
Shinji Takayama
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Stability ◽  
Thin Film Transistor ◽  
High Thermal Stability ◽  
Low Resistivity

Optical Birefringence to Determine Morphological Changes in Low-K Thin Film CVD Polymers

1998 ◽  
Vol 511 ◽  
Author(s):  
Jay J. Senkevich ◽  
Viktor Simkovic ◽  
Seshu B. Desu
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Stability ◽  
Dielectric Constant ◽  
Film Thickness ◽  
Thermal History ◽  
Deposition Temperature ◽  
Morphological Changes ◽  
High Thermal Stability ◽  
Optical Birefringence

ABSTRACTA great interest exists to reduce power consumption, cross-talk, and RC-delay in ULSI devices by replacing SiO2(k=3.9−4.3) with a polymeric material (k<3.0). Unlike SiO2, polymeric thin films exhibit a complex morphology which varies with the polymer's thermal history, deposition temperature, and film thickness. Since the morphology of the polymer thin film ultimately affects its properties such as its dielectric constant, methods need to be developed to understand the morphological changes in polymer thin films. Further, the polymer thin films must exhibit a high thermal stability due to the relatively high back-end-of-line (BEOL) processing temperature. The polymers which exhibit high thermal stability often contain a mainchain benzene ring. Since benzene has a high anisotropic molecular polarizability, optical birefringence can be used to monitor the polymer chain conformation as a function of the polymer's thermal history, thickness or deposition conditions. Poly(p-xylylene) and poly(tetraflouro-p-xylylene) are shown to have a large negative birefringence, increasing until polymer decomposition. Poly(p-xylylene) becomes increasingly more negatively birefringent after a crystallographic phase change at 220°C. A high negative birefringence results in a large in-plane capacitance, negatively impacting the polymers potential benefit. owever, poly(chlorop-xylylene) and poly(dichloro-p-xylylene) exhibit positive birefringence, which increases until their crystalline melting points at ∼290°C and ∼380°C and thereafter decreases due to film disruption. Conclusions will be drawn based on this positive birefringence for the future molecular design of CVD polymers to decrease their in-plane dielectric constant. Urther poly(chloro-p-xylylene) and poly(p-xylylene) are investigated as a function of deposition temperature and film thickness.

scholarly journals Investigation of reactively sputtered TaN thin-film resistors for microwave photonic applications

2021 ◽  
pp. 93-98
Author(s):  
Evgenii Erofeev ◽  
Egor Polyntsev ◽  
Sergei Ishutkin
Keyword(s):  
Thin Film ◽  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Electrical Resistance ◽  
High Thermal Stability ◽  
Tantalum Nitride ◽  
Reactive Magnetron ◽  
Microwave Photonic ◽  
Thin Film Resistors ◽  
Thermal Stability Of

Electrophysical characteristics and their thermal stability of thin-film resistors based on tantalum nitride (TaN) obtained by reactive magnetron sputtering were investigated. The optimal modes of the magnetron sputtering process are determined, ensuring the Ta2N phase film composition with the value of the specific electrical resistance of 250 μm cm and high thermal stability of the parameters. On the basis of the investigations carried out, thin-film matching resistors were manufactured for use as part of an electro-optical InP-based MZ modulator

Thin Film Morphology and GrowthMechanism of Pentacene Thin Film Using Low-Pressure Organic Vapor Deposition

2003 ◽  
Vol 769 ◽  
Author(s):  
Seong Deok Ahn ◽  
Seung Youl Kang ◽  
Yong Eui Lee ◽  
Meyoung Ju Joung ◽  
Chul Am Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Vapor Deposition ◽  
Thin Film Transistor ◽  
Low Pressure ◽  
Chamber Pressure ◽  
Film Morphology ◽  
Organic Thin Film ◽  
Organic Thin Film Transistor ◽  
Organic Vapor

AbstractWe have investigated the growth mechanism and thin film morphology of pentacene thin films by the process of low-pressure gas assisted organic vapor deposition (LP-GAOVD). As the source temperature, flow rate of the carrier gas, substrate temperature and chamber pressure were varied, the growth rate, morphology and grain size of the films were differently obtained. The electrical properties of pentacene thin films for applications in organic thin film transistor and electrophoretic displays were discussed

scholarly journals High-performance La-doped BCZT thin film capacitors on LaNiO3/Pt composite bottom electrodes with ultra-high efficiency and high thermal stability

2019 ◽  
Vol 45 (9) ◽  
pp. 11749-11755 ◽  
Author(s):  
Shangkai He ◽  
Biaolin Peng ◽  
Glenn J.T. Leighton ◽  
Christopher Shaw ◽  
Ningzhang Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Stability ◽  
High Performance ◽  
High Efficiency ◽  
High Thermal Stability ◽  
Thin Film Capacitors ◽  
La Doped
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