High-resolution silicon patterning with self-assembled monolayer resists
1996 ◽
Vol 14
(6)
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pp. 4085
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Keyword(s):
2011 ◽
Vol 605
(11-12)
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pp. 1016-1020
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2015 ◽
Vol 135
(2)
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pp. 168-173
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Keyword(s):
2019 ◽
Keyword(s):