Control of emission characteristics of silicon field emitter arrays by an ion implantation technique

1996 ◽  
Vol 14 (3) ◽  
pp. 1885 ◽  
Author(s):  
Seigo Kanemaru
Keyword(s):  
Ion Implantation ◽  
Implantation Technique ◽  
Emission Characteristics ◽  
Field Emitter ◽  
Field Emitter Arrays

Stable Emission Characteristics of Low Work Function Amorphous Carbon Coated Transfer Mold Nickel Field Emitter Arrays in Harsh Environment

2011 ◽  
Vol 222 ◽  
pp. 138-141
Author(s):  
Masayuki Nakamoto ◽  
Jong Hyun Moon
Keyword(s):  
Work Function ◽  
Field Emission ◽  
Amorphous Carbon ◽  
Oxygen Radical ◽  
Harsh Environments ◽  
Satellite Orbits ◽  
Emission Characteristics ◽  
Field Emitter ◽  
Radical Treatment ◽  
Field Emitter Arrays

Low work function amorphous carbon Transfer Mold field emitter arrays (a-C-FEAs) have been fabricated by combining the Transfer Mold emitter fabrication method and the emitter material coating method to realize stable vacuum nanoelectronic devices in harsh environments of aerospace. The emitter tips of a-C-FEAs are extremely sharpened to 26.7-30.7 nm of tip radii. Work function of a-C-FEAs was as low as 3.6 eV compared with those of conventional emitter materials such as carbon nanotube of 5.0 eV. Oxygen radical flux intensity of 1015 atoms/cm2•sec was used for the evaluation of field emission characteristics, whose value is 107-108 times higher than those of 107-108 atoms/cm2•sec in aerospace of satellite orbits. As the oxygen radical treatment time increased, turn-on fields of Ni-FEAs exhibited the 2.2 times degradation from 14.9 V/µm to 32.7 V/µm. Those of a-C-FEAs have been keeping almost the same value of 20.8-23.7 V/µm after oxygen radical treatment. The a-C-FEAs exhibit stable field emission characteristics in harsh environments.

INVESTIGATION OF THE DEGRADATION MECHANISM OF FIELD-EMITTER ARRAYS

2001 ◽  
Vol 08 (06) ◽  
pp. 699-702
Author(s):  
JING YUAN ◽  
DE-JIE LI ◽  
BING-CHU DU
Keyword(s):  
Theoretical Analysis ◽  
Ion Implantation ◽  
Degradation Mechanism ◽  
Field Emitter ◽  
Field Emitter Arrays

There are three primary explanations for the degradation mechanism of field-emitter arrays (FEA's): oxidation, sputtering damage and ion implantation. Theoretical analysis and calculation are carried out in this paper to investigate the issue deeply. Adsorption and oxidation of FEA's fit best the experimental phenomenon and are the most reasonable causes for it. The process of adsorption and oxidation is described and directions for further experiments are suggested.

Emission characteristics of JFET-based field emitter arrays

2002 ◽  
Author(s):  
K. Yokoo ◽  
M. Arai ◽  
M. Kawakami ◽  
H. Kayama ◽  
N. Kitano ◽  
...  
Keyword(s):  
Emission Characteristics ◽  
Field Emitter ◽  
Field Emitter Arrays
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