Effects of heavy atoms added into a resist on energy absorption in x-ray lithography

Author(s):  
Kenji Murata
Keyword(s):  
X Ray ◽  
Author(s):  
Michael R. Jackson ◽  
Thomas L. Selby

A recombinant metal-dependent phosphatidylinositol-specific phospholipase C (PI-PLC) fromStreptomyces antibioticushas been crystallized by the hanging-drop method with and without heavy metals. The native crystals belonged to the orthorhombic space groupP222, with unit-cell parametersa= 41.26,b= 51.86,c = 154.78 Å. The X-ray diffraction results showed significant differences in the crystal quality of samples soaked with heavy atoms. Additionally, drop pinning, which increases the surface area of the drops, was also used to improve crystal growth and quality. The combination of heavy-metal soaks and drop pinning was found to be critical for producing high-quality crystals that diffracted to 1.23 Å resolution.


1997 ◽  
Vol 82 (6) ◽  
pp. 2742-2753 ◽  
Author(s):  
T. H. V. T. Dias ◽  
J. M. F. dos Santos ◽  
P. J. B. M. Rachinhas ◽  
F. P. Santos ◽  
C. A. N. Conde ◽  
...  

2011 ◽  
Vol 89 (7) ◽  
pp. 854-862
Author(s):  
Glenn A. Facey ◽  
Ilia Korobkov

The tri-ortho-thymotide (TOT) clathrates of dibromo- and dichloromethane were characterized by single crystal X-ray diffraction at 200 K and solid-state 2H NMR spectroscopy as a function of temperature. The host structure was found to be typical of other cage-type TOT clathrates. The X-ray results showed a substantial amount of disorder among the guest molecules. In both clathrates, multiple guest molecule positions could be modeled. The heavy atoms of all the guest molecule positions lie approximately in the same plane, with some out-of-plane distortion. The guest molecules were of two different types in positions symmetric about the crystallographic twofold rotation axis: type A guests, with carbon atoms well removed from the crystallographic twofold axis, and type B guests, with carbon atoms very close to the twofold axis. The 2H NMR spectra for the guests confirmed that the disorder was dynamic. The experimental results could be accounted for by the presence of three simultaneous types of molecular motion, all fast with respect to the 2H quadrupolar interaction: (i) twofold molecular flips about the molecular C2 symmetry axis, (ii) exchange between the type A and type B sites in a single plane, and (iii) a two-site libration of the plane containing the heavy atoms of the A and B guest sites with a temperature-dependent amplitude.


2018 ◽  
Vol 185 (1) ◽  
pp. 27-33
Author(s):  
Katharina Bairlein ◽  
Oliver Hupe

Abstract In Report No. 90 of the International Commission on Radiation Units and Measurements (ICRU), new mass energy-absorption coefficients are listed which are based on renormalized Scofield photoeffect cross-sections. The mass energy-absorption coefficients are the basis for the conversion coefficients from air kerma to the operational quantities listed in ISO 4037-3. Although ICRU does not give a recommendation if these new mass energy-absorption coefficients should be applied instead of the values used so far, an examination of the possible consequences for radiation protection quantities is necessary. We calculated the conversion coefficients for the X-ray qualities specified in ISO 4037-1 with the new mass energy-absorption coefficients and with the mass energy-absorption coefficients used so far to determine the deviations. Our calculations show that the change of the conversion coefficients due to the new values from ICRU Report No. 90 is negligible.


1987 ◽  
Vol 93 ◽  
pp. 281-292
Author(s):  
W. Pietsch ◽  
W. Voges ◽  
E. Kendziorra ◽  
M. Pakull

AbstractThe 805 sec pulsing X-ray source H2252−035 has been observed for 7 h on September 14/15 and on September 17, 1983 in X-rays with the low energy telescope and the medium energy detectors of EXOSAT. While below 2 keV the semiamplitude of the 805 s pulses is ~ 100% in the 2.3–7.9 keV band it is only ~ 40%. X-ray dips that are more pronounced in low energies occur simultaneously with the orbital minimum of the optical light curve. The medium energy spectra during dips with respect to the non dip spectrum can be explained by just enhanced cold gas absorption of an additional absorbing column of 2 1022 cm−2. Model spectra for the 805 s minimum have to include a strong iron emission line at 6.55 keV with an equivalent width of 3 keV in addition to a reduced continuum intensity (radiating area) and enhanced low energy absorption.


Very valuable studies of the directions in which photo-electrons are ejected by X-rays have been made recently by Williams, Auger, and Anderson. All of these observers, however, used the C. T. R. Wilson expansion-chamber method which, in spite of its power in working with the individual electron, suffers from the disadvantage that the particular energy level in the atom from which the electron is ejected in general cannot be determined. It is true that in the case of heavy atoms such as xenon and bromine, Auger and Anderson succeeded, through the use of X-rays of particular energies, in distinguishing the electrons thrown out of the K level from those thrown out of the L levels, but to go much further in this direction by the expansion-chamber method (and, for example, to distinguish the L I from the L II or L III electrons) seems hopeless. Consequently, the magnetic spectrograph developed by one of us for studying the velocity of the X-ray electrons as a function of the angle of emission was applied to the problem with the results which it is the purpose of this paper to describe. We, as yet, have not succeeded in determining the actual directions of ejection with the precision which has been attained in the expansion-chamber method, but the resolving power of the apparatus for velocities is so large that the particular level in which each electron group originates is in general quite unambiguous. A description of the apparatus used and the procedure followed has been given in the paper referred to above and need not be repeated here. Ballast lamps of the sort developed at the General Electric Company and sold by the Radio Corporation of America (radiotron UV-886) have proved very useful in holding the current through the solenoid which produces the magnetic field constant during the long exposures (100-200 hours) which are necessary. Eastman X-ray plates were used throughout, as they have been found to be the most sensitive of any so far tried (except Schumann plates which are much too irregular for intensity measurements). The work has been seriously handicapped by the lack of sensibility of the photographic plates for slow electrons and by their rapid falling off in sensibility for electrons of velocities below about 12,000 volts. X-ray tubes with silver, molybdenum and copper anticathodes were used. The characteristic radiation from copper is, however, in spite of its intrinsic intensity, too soft to eject electrons with sufficient velocity to give photographic results in a reasonable length of time with the apparatus used. All the results shown below consequently were obtained with the characteristic rays of either silver or molybdenum.


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