Structural characterization of plasma-doped silicon by high resolution x-ray diffraction
1994 ◽
Vol 12
(2)
◽
pp. 951
◽
Keyword(s):
X Ray
◽
1988 ◽
Vol 3
(6)
◽
pp. 1327-1335
◽
2012 ◽
Vol 620
◽
pp. 22-27
◽
Keyword(s):
Keyword(s):