Constructive three-dimensional lithography with electron-beam induced deposition for quantum effect devices

1993 ◽  
Vol 11 (6) ◽  
pp. 2386 ◽  
Author(s):  
Hans W. P. Koops
Keyword(s):  
Electron Beam ◽  
Quantum Effect ◽  
Three Dimensional ◽  
Electron Beam Induced Deposition

Creation of Patterned Gold Nanostructures via Electron-Beam-Induced Deposition

2013 ◽  
Vol 1546 ◽  
Author(s):  
Anastasia V. Riazanova ◽  
Johannes J. L. Mulders ◽  
Lyubov M. Belova
Keyword(s):  
Electron Beam ◽  
Three Dimensional ◽  
Area Ratio ◽  
Ex Situ ◽  
Geometrical Shape ◽  
Local Electron ◽  
Post Annealing ◽  
Treatment Conditions ◽  
Heat Treated ◽  
Electron Beam Induced Deposition

ABSTRACTOne of the methods to grow nanoscale three-dimensional (3D) Au patterns is to perform local electron-beam-induced deposition (EBID) using the Me2Au(acac) precursor inside the chamber of a scanning electron microscope (SEM). However, due to the organometallic nature of the chemical, the concentration of the metallic constituent in the as-deposited structure is dramatically low, at around 10 at. % of Au. Ex-situ post-annealing of Me2Au(acac) EBIDs is a very promising purification approach, resulting in an Au content of > 92 at. % after annealing at 600 °C. However, in most of the cases it also distorts the geometrical shape of the heat-treated structure, preserving of which is essential for the application. In this paper we present a systematic study of the dependence between the annealing parameters and resulting purity in combination with the shape of the Au structure. Optimized heat treatment conditions for the creation of well-purified high aspect ratio Au pillar array are presented; and for planar continuous structures, the importance of the parameter height to area ratio is identified.

scholarly journals Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

2018 ◽  
Vol 9 ◽  
pp. 2581-2598 ◽  
Author(s):  
Lukas Keller ◽  
Michael Huth
Keyword(s):  
Electron Beam ◽  
3D Structure ◽  
Three Dimensional ◽  
Pattern Generation ◽  
Proximity Effects ◽  
Writing Strategies ◽  
Direct Write ◽  
Nanoscale Structures ◽  
Geometrical Description ◽  
Electron Beam Induced Deposition

Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam’s movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.

Focused-electron-beam-induced deposition of freestanding three-dimensional nanostructures of pure coalesced copper crystals

2002 ◽  
Vol 81 (17) ◽  
pp. 3245-3247 ◽  
Author(s):  
I. Utke ◽  
A. Luisier ◽  
P. Hoffmann ◽  
D. Laub ◽  
P. A. Buffat
Keyword(s):  
Electron Beam ◽  
Three Dimensional ◽  
Electron Beam Induced Deposition ◽  
Copper Crystals

scholarly journals Three dimensional magnetic nanowires grown by focused electron-beam induced deposition

2013 ◽  
Vol 3 (1) ◽  
Author(s):  
Amalio Fernández-Pacheco ◽  
Luis Serrano-Ramón ◽  
Jan M. Michalik ◽  
M. Ricardo Ibarra ◽  
José M. De Teresa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Three Dimensional ◽  
Magnetic Nanowires ◽  
Electron Beam Induced Deposition

Iron Nanostructures Fabricated by Electron Beam Induced Deposition and its Magnetic Properties

2007 ◽  
Vol 124-126 ◽  
pp. 139-142 ◽  
Author(s):  
Kazuo Furuya ◽  
Masaki Takeguchi ◽  
Kazutaka Mitsuishi
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Iron Carbide ◽  
Iron Concentration ◽  
Three Dimensional ◽  
Iron Carbonyl ◽  
Magnetic Flux Density ◽  
Electron Holography ◽  
Carbide Phases ◽  
Electron Beam Induced Deposition

Electron beam induced deposition (EBID) was carried out with gas introduction systems attached to field emission scanning electron microscope (FE-SEM). Using iron carbonyl and ferrocene, three dimensional (3-D) antenna structures were fabricated in the range of 30-50 nm in diameter and 500-1000 nm in size. Post-deposition annealing of iron nanostructures resulted in the formation of crystalline alpha-iron and iron carbide phases. The iron concentration was controlled by the partial pressure of iron carbonyl and ferrocene. Electron holography observation with field emission transmission electron microscopy (FE-TEM) revealed that the remanent magnetic flux density Br of the nanostructures also depends on the iron concentration.

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