Low stress and optically transparent chromium oxide layer for x-ray mask making
1993 ◽
Vol 11
(6)
◽
pp. 2990
◽
Keyword(s):
X Ray
◽
Keyword(s):
Keyword(s):
2011 ◽
Vol 60
(4)
◽
pp. 1499-1502
◽
Keyword(s):
X-ray mask making by EBL and Monte Carlo analysis of a single-resist layer process on low-z membrane
1989 ◽
Vol 9
(1-4)
◽
pp. 147-150
◽