Response surface modeling of high pressure chemical vapor deposited blanket tungsten

1991 ◽  
Vol 9 (3) ◽  
pp. 1478 ◽  
Author(s):  
Thomas E. Clark
Keyword(s):  
High Pressure ◽  
Response Surface ◽  
Chemical Vapor ◽  
Surface Modeling ◽  
Response Surface Modeling ◽  
Chemical Vapor Deposited ◽  
Pressure Chemical

Characterization of InN layers grown by high-pressure chemical vapor deposition

2006 ◽  
Vol 89 (11) ◽  
pp. 112119 ◽  
Author(s):  
M. Alevli ◽  
G. Durkaya ◽  
A. Weerasekara ◽  
A. G. U. Perera ◽  
N. Dietz ◽  
...  
Keyword(s):  
High Pressure ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Pressure Chemical
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