Effects of mirror surface roughness on exposure field uniformity in synchrotron x-ray lithography

AbstractThis is the first in a series of articles which present a new framework for computing the standard uncertainty in electron excited X-ray microanalysis measurements. This article will discuss the framework and apply it to a handful of simple, but useful, subcomponents of the larger problem. Subsequent articles will handle more complex aspects of the measurement model. The result will be a framework in which sophisticated and practical models of the uncertainty for real-world measurements. It will include many long overlooked contributions like surface roughness and coating thickness. The result provides more than just error bars for our measurements. It also provides a framework for measurement optimization and, ultimately, the development of an expert system to guide both the novice and expert to design more effective measurement protocols.

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Characteristic properties of AlTiN and TiN coated HSS materials

Industrial Lubrication and Tribology ◽

10.1108/ilt-10-2012-0097 ◽

2015 ◽

Vol 67 (2) ◽

pp. 172-180 ◽

Cited By ~ 3

Author(s):

Mumin Sahin ◽

Cenk Misirli ◽

Dervis Özkan

Keyword(s):

Surface Roughness ◽

Tensile Strength ◽

High Speed ◽

Cutting Tools ◽

High Speed Steel ◽

Wear Properties ◽

Content Type ◽

X Ray ◽

Number Of Cycles ◽

Future Work

Purpose – The purpose of this paper is to examine mechanical and metallurgical properties of AlTiN- and TiN-coates high-speed steel (HSS) materials in detail. Design/methodology/approach – In this study, HSS steel parts have been processed through machining and have been coated with AlTiN and TiN on physical vapour deposition workbench at approximately 6,500°C for 4 hours. Tensile strength, fatigue strength, hardness tests for AlTiN- and TiN-coated HSS samples have been performed; moreover, energy dispersive X-ray spectroscopy and X-ray diffraction analysis and microstructure analysis have been made by scanning electron microscopy. The obtained results have been compared with uncoated HSS components. Findings – It was found that tensile strength of TiAlN- and TiN-coated HSS parts is higher than that of uncoated HSS parts. Highest tensile strength has been obtained from TiN-coated HSS parts. Number of cycles for failure of TiAlN- and TiN-coated HSS parts is higher than that for HSS parts. Particularly TiN-coated HSS parts have the most valuable fatigue results. However, surface roughness of fatigue samples may cause notch effect. For this reason, surface roughness of coated HSS parts is compared with that of uncoated ones. While the average surface roughness (Ra) of the uncoated samples was in the range of 0.40 μm, that of the AlTiN- and TiN-coated samples was in the range of 0.60 and 0.80 μm, respectively. Research limitations/implications – It would be interesting to search different coatings for cutting tools. It could be the good idea for future work to concentrate on wear properties of tool materials. Practical implications – The detailed mechanical and metallurgical results can be used to assess the AlTiN and TiN coating applications in HSS materials. Originality/value – This paper provides information on mechanical and metallurgical behaviour of AlTiN- and TiN-coated HSS materials and offers practical help for researchers and scientists working in the coating area.

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The Effect of Sodium Silicate Concentration on the Properties of the Coating Formed on Pure Zirconium by Microarc Oxidation Coating Technique

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.445.637 ◽

2012 ◽

Vol 445 ◽

pp. 637-642 ◽

Cited By ~ 4

Author(s):

Y. Gencer ◽

M. Tarakci ◽

S. Cengiz ◽

K.O. Gunduz

Keyword(s):

Surface Roughness ◽

Sodium Silicate ◽

Zirconium Oxide ◽

Microarc Oxidation ◽

Phase Content ◽

Oxide Coatings ◽

Silicate Concentration ◽

X Ray ◽

Pure Zirconium ◽

Scanning Electron

In this study, zirconium oxide coatings were formed on pure zirconium by microarc oxidation technique with the electrolytes containing KOH and different amounts of sodium silicate (0-40 gr/lt) for the same coating duration of 2 hours. The microstructure, surface roughness, phase content and chemical composition of the coatings were characterized by using scanning electron microscopy, profilometery and X-ray diffractometry. It was found that the coatings on surface of zirconium consist of monoclinic ZrO2 (m-ZrO2) and tetragonal ZrO2 (t-ZrO2) phases and the addition and increasing sodium silicate concentration in the electrolyte increases amount of t-ZrO2 phase. The coatings were well adhered to Zr substrate with some cracks and porosities in the coating for all concentrations of sodium silicate. The coating thickness and surface roughness increased with sodium silicate concentration in the electrolyte. A glaze like Si rich structure and its increase with Si rate was evident in the outermost region of the coating.

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Effect of Surface Chemistry on Ruthenium Wet Etching

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.314.302 ◽

2021 ◽

Vol 314 ◽

pp. 302-306

Author(s):

Quoc Toan Le ◽

E. Kesters ◽

M. Doms ◽

Efrain Altamirano Sánchez

Keyword(s):

Surface Roughness ◽

Photoelectron Spectroscopy ◽

Etching Rate ◽

Wet Etching ◽

X Ray ◽

Force Microscopy ◽

Metal Free ◽

Atomic Force ◽

Different Types ◽

Effect Of Surface

Different types of ALD Ru films, including as-deposited, annealed Ru, without and with a subsequent CMP step, were used for wet etching study. With respect to the as-deposited Ru, the etching rate of the annealed Ru film in metal-free chemical mixtures (pH = 7-9) was found to decrease substantially. X-ray photoelectron spectroscopy characterization indicated that this behavior could be explained by the presence of the formation of RuOx (x = 2,3) caused by the anneal. A short CMP step applied to the annealed Ru wafer removed the surface RuOx, at least partially, resulting in a significant increase of the etching rate. The change in surface roughness was quantified using atomic force microscopy.

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Interference between magnetism and surface roughness in coherent soft x-ray scattering

Physical Review B ◽

10.1103/physrevb.65.235421 ◽

2002 ◽

Vol 65 (23) ◽

Cited By ~ 11

Author(s):

A. Rahmim ◽

S. Tixier ◽

T. Tiedje ◽

S. Eisebitt ◽

M. Lörgen ◽

...

Keyword(s):

Surface Roughness ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

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A Solution to the Problem of X-Ray Mapping Samples with Surface Roughness

Microscopy and Microanalysis ◽

10.1017/s1431927609096068 ◽

2009 ◽

Vol 15 (S2) ◽

pp. 530-531 ◽

Cited By ~ 2

Author(s):

R Anderhalt ◽

D Chan ◽

M Lupu

Keyword(s):

Surface Roughness ◽

X Ray

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

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Influence of Electron Beam Pulsed Times on the Properties of 40Cr

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.154-155.1170 ◽

2010 ◽

Vol 154-155 ◽

pp. 1170-1177

Author(s):

Yuan Fang Chen ◽

Xiao Dong Peng ◽

Jian Jun Hu ◽

Hong Bin Xu ◽

Chan Hao

Keyword(s):

Surface Roughness ◽

Wear Resistance ◽

Corrosion Resistance ◽

Electron Beam ◽

High Current ◽

Wear Properties ◽

X Ray ◽

Pulsed Electron Beam ◽

Surface Microstructures ◽

40Cr Steel

Surface modification of 40Cr steel by high current pulsed electron beam has been investigated . The pulsed times of HCPEB was changed from 1 to 25 to prepare different specimens. Surface microstructures and section microstructures after HCPEB irradiation were detected by using metallurgical microscope, SEM and X-ray diffractometer. It is shown that crater defects were found on the surface after the irradiation of HCPEB and the density of craters will decrease with increasing pulses times. When treated by 27Kev accelerating voltage, with increasing pulse times, the particles located in surface layer were obviously refined .The surface roughness, hardness, wear properties and corrosion resistance were analyzed after irradiation of HCPEB. The wear resistance and corrosion resistance were obviously enhanced after 10 pulses treatment.

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Analysis of CoCrMo Surface Oxide Removal by Alumina Blasting before Porcelain Firing in Dental Restorations

Materials Science Forum ◽

10.4028/www.scientific.net/msf.730-732.9 ◽

2012 ◽

Vol 730-732 ◽

pp. 9-14 ◽

Cited By ~ 2

Author(s):

Bruno Henriques ◽

Filipe Silva ◽

Delfim Soares

Keyword(s):

Heat Treatment ◽

Surface Roughness ◽

Chemical Composition ◽

High Alumina ◽

X Ray ◽

Dental Restorations ◽

Ceramic Bond ◽

Xrf Scanning ◽

Oxide Removal

The purpose of this work was to perform a chemical and mechanical characterization of a preoxidized CoCrMo alumina blasted surface. This is a commonly performed surface treatment used in metal-porcelain systems for dental restorations to remove oxides formed during preoxidation heat treatment from the metal’s surface. CoCrMo dental alloy’s specimens produced by lost wax process were examined in terms of chemical composition using X-Ray fluorescence spectroscopy (XRF), Scanning Electron Microscopy (SEM) and Energy Dispersive X-Ray Spectroscopy (EDS); in terms of mechanical characteristics through the means of a microhardness test and in terms of surface roughness using a profilometer. It was investigated the chemical composition of various surface conditions: non-preoxidized, preoxidized, ground oxidized surface and sandblasted oxidized surface. After alumina blasting, the oxides level on metal’s surface remained high. Alumina blasting treatment (Ø110 µm) produced an 84% increase of CoCrMo surface hardening and an increase in surface roughness (Ra=0.58 µm). It was found alumina contaminants on the metal’s surface. Therefore, it was concluded that alumina blasting do not entirely removes the oxide layer formed during preoxidation heat treatment. It produced a chemical and mechanical surface modification that can influence the metal-ceramic bond strength.

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