A program for Monte Carlo simulation of electron energy loss in nanostructures

Author(s):  
S. Johnson
1997 ◽  
Vol 04 (05) ◽  
pp. 955-958 ◽  
Author(s):  
K. TÖKÉSI ◽  
L. KÖVÉR ◽  
D. VARGA ◽  
J. TÓTH ◽  
T. MUKOYAMA

The energy distribution of the electrons backscattered in the direction of the surface normal of polycrystalline silver samples was studied using reflected electron energy loss spectroscopy (REELS) at 200 eV and 2 keV primary beam energies. For modeling the electron scattering processes, the Monte Carlo simulation technique was used and the REELS spectra were calculated at various (25°, 50° and 75°, with respect to the surface normal) angles of primary beam incidence. The effects of the surface energy loss process in REELS are evaluated from the comparison of the experimental and simulated spectra.


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