Thermal and mechanical model of x-ray lithography masks under short pulse irradiation
1989 ◽
Vol 7
(6)
◽
pp. 1575
◽
2005 ◽
Vol 537
(1-2)
◽
pp. 117-124
◽
2011 ◽
Vol 5
(3)
◽
pp. 431-439
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