Silicon dioxide fine patterning by reactive fast atom beam etching

1988 ◽  
Vol 6 (5) ◽  
pp. 1565 ◽  
Author(s):  
Hiroki Kuwano
Keyword(s):  
Silicon Dioxide ◽  
Atom Beam ◽  
Fast Atom Beam ◽  
Fast Atom Beam Etching

scholarly journals Freestanding HfO2 grating fabricated by fast atom beam etching

2011 ◽  
Vol 6 (1) ◽  
Author(s):  
Yongjin Wang ◽  
Tong Wu ◽  
Yoshiaki Kanamori ◽  
Kazuhiro Hane
Keyword(s):  
Atom Beam ◽  
Fast Atom Beam ◽  
Fast Atom Beam Etching

Broadband Antireflection Gratings for Glass Substrates Fabricated by Fast Atom Beam Etching

2000 ◽  
Vol 39 (Part 2, No. 7B) ◽  
pp. L735-L737 ◽  
Author(s):  
Yoshiaki Kanamori ◽  
Hisao Kikuta ◽  
Kazuhiro Hane
Keyword(s):  
Atom Beam ◽  
Glass Substrates ◽  
Broadband Antireflection ◽  
Fast Atom Beam ◽  
Fast Atom Beam Etching

Fast Atom Beam Etching of Glass Materials with Contact and Non-Contact Masks

1997 ◽  
Vol 36 (Part 1, No. 12B) ◽  
pp. 7655-7659 ◽  
Author(s):  
Yasushi Toma ◽  
Masahiro Hatakeyama ◽  
Katsunori Ichiki ◽  
Hailing Huang ◽  
Kazuo Yamauchi ◽  
...  
Keyword(s):  
Atom Beam ◽  
Fast Atom Beam ◽  
Fast Atom Beam Etching
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