New high current low energy ion source

1987 ◽  
Vol 5 (1) ◽  
pp. 366 ◽  
Author(s):  
T. Hara
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
High Current

Low-energy, high-current, ion source with cold electron emitter

2012 ◽  
Vol 83 (2) ◽  
pp. 02B301
Author(s):  
A. V. Vizir ◽  
M. V. Shandrikov ◽  
G. Yu. Yushkov ◽  
E. M. Oks
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Cold Electron ◽  
High Current ◽  
Electron Emitter

Gridless, very low energy, high-current, gaseous ion source

2010 ◽  
Vol 81 (2) ◽  
pp. 02B307 ◽  
Author(s):  
A. V. Vizir ◽  
M. V. Shandrikov ◽  
G. Yu. Yushkov ◽  
E. M. Oks
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
High Current

New High Current Low Energy Ion Source

1986 ◽  
Vol 25 (Part 2, No. 3) ◽  
pp. L252-L253 ◽  
Author(s):  
Tamio Hara ◽  
Manabu Hamagaki ◽  
Atsuo Sanda ◽  
Yoshinobu Aoyagi ◽  
Susumu Namba
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
High Current

Inverted end-Hall-type low-energy high-current gaseous ion source

2008 ◽  
Vol 79 (2) ◽  
pp. 02B302 ◽  
Author(s):  
E. M. Oks ◽  
A. V. Vizir ◽  
M. V. Shandrikov ◽  
G. Yu. Yushkov ◽  
D. M. Grishin ◽  
...  
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
High Current

Optimization of Compact Microwave Ion Source for Generation of High Current and Low Energy Ion Beam

2011 ◽  
Author(s):  
Shuhei Taguchi ◽  
Yasuhito Gotoh ◽  
Hiroshi Tsuji ◽  
Shigeki Sakai ◽  
Junzo Ishikawa ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Low Energy ◽  
High Current ◽  
Microwave Ion Source

Low-Energy High-Current Ion Source for Ion-Milling Equipment

CIRP Annals ◽  
1984 ◽  
Vol 33 (1) ◽  
pp. 105-108
Author(s):  
T. Masuzawa ◽  
I. Tsuchiya ◽  
N. Kinoshita
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
High Current ◽  
Ion Milling ◽  
Milling Equipment

scholarly journals ULTRA-LOW-ENERGY HIGH-CURRENT ION SOURCE

2009 ◽  
Author(s):  
Andre Anders ◽  
Georgy Yu. Yushkov ◽  
David A. Baldwin
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
High Current
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