Auger electron spectroscopy sputter depth profiles on AlxGa1−xAs protected by As and GaAs ultrathin layers

P. Etienne

doi:10.1116/1.583509

Auger electron spectroscopy sputter depth profiles on AlxGa1−xAs protected by As and GaAs ultrathin layers

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583509 ◽

1986 ◽

Vol 4 (6) ◽

pp. 1301 ◽

Cited By ~ 6

Author(s):

P. Etienne

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiles ◽

Ultrathin Layers

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Determination of the depth resolution of Auger electron spectroscopy depth profiles of anodic barrier oxide films on differently pretreated aluminium substrates

Surface and Interface Analysis ◽

10.1002/sia.740220139 ◽

1994 ◽

Vol 22 (1-12) ◽

pp. 175-180 ◽

Cited By ~ 8

Author(s):

J. De Laet ◽

K. De Boeck ◽

H. Terryn ◽

J. Vereecken

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxide Films ◽

Depth Resolution ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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Evaluation of Auger Electron Spectroscopy (AES) depth-profiles by application of Factor Analysis

Fresenius Journal of Analytical Chemistry ◽

10.1007/bf00322110 ◽

1991 ◽

Vol 341 (1-2) ◽

pp. 70-73 ◽

Cited By ~ 5

Author(s):

E. Oesterschulze ◽

K. Ma�eli ◽

R. Kassing

Keyword(s):

Factor Analysis ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiles

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Superposition of Auger electron spectroscopy depth profiles obtained on Cr/Ni multilayer samples with different roughnesses

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574642 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1209-1212 ◽

Cited By ~ 11

Author(s):

A. Zalar ◽

S. Hofmann

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1345899 ◽

2001 ◽

Vol 19 (4) ◽

pp. 1111-1115 ◽

Cited By ~ 15

Author(s):

S. Hofmann ◽

A. Rar ◽

D. W. Moon ◽

K. Yoshihara

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Layer Structure ◽

Quantitative Comparison ◽

Depth Profiles ◽

Double Layer Structure ◽

Information Depth ◽

Secondary Ion

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A comparison between electron energy loss spectroscopy and Auger electron spectroscopy sputtering depth profiles of Ta2O5/Ta

Thin Solid Films ◽

10.1016/0040-6090(84)90294-3 ◽

1984 ◽

Vol 120 (3) ◽

pp. 185-189 ◽

Cited By ~ 7

Author(s):

J.M. Sanz ◽

S. Hofmann

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiles ◽

Electron Energy Loss

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A comparison of X-ray photoelectron spectroscopy and Auger electron spectroscopy depth profiles for magnesium implants

Applied Surface Science ◽

10.1016/0169-4332(94)00362-9 ◽

1995 ◽

Vol 84 (1) ◽

pp. 23-29 ◽

Cited By ~ 2

Author(s):

J.A. Schreifels ◽

N.H. Turner ◽

R.E. Morris

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

X Ray ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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The depth resolution of composition-depth profiles obtained by ball-cratering and Auger electron spectroscopy

Vacuum ◽

10.1016/0042-207x(81)90080-4 ◽

1981 ◽

Vol 31 (10-12) ◽

pp. 625-629 ◽

Cited By ~ 7

Author(s):

IK Brown ◽

DD Hall ◽

JM Walls

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Resolution ◽

Depth Profiles

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5412. The depth resolution of composition-depth profiles obtained by ballcratering and Auger electron spectroscopy

Vacuum ◽

10.1016/0042-207x(82)94008-8 ◽

1982 ◽

Vol 32 (12) ◽

pp. 774-775

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Resolution ◽

Depth Profiles

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Application of linear least squares to the analysis of Auger electron spectroscopy depth profiles of plutonium oxides

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5021587 ◽

2018 ◽

Vol 36 (3) ◽

pp. 03E104 ◽

Cited By ~ 3

Author(s):

Scott B. Donald ◽

Jeff A. Stanford ◽

William McLean ◽

Art J. Nelson

Keyword(s):

Auger Electron Spectroscopy ◽

Least Squares ◽

Electron Spectroscopy ◽

Auger Electron ◽

Linear Least Squares ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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Quantitative analysis of CN∕TiCN∕TiN multilayers and their thermal stability by Auger electron spectroscopy and Rutherford backscattering spectrometry depth profiles

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2165664 ◽

2006 ◽

Vol 24 (2) ◽

pp. 250-260 ◽

Cited By ~ 1

Author(s):

P. Prieto ◽

C. Morant ◽

A. Climent-Font ◽

A. Muñoz ◽

E. Elizalde ◽

...

Keyword(s):

Thermal Stability ◽

Quantitative Analysis ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Rutherford Backscattering Spectrometry ◽

Rutherford Backscattering ◽

Depth Profiles

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