Ultrahigh molecular weight poly(methyl methacrylate) as an electron-beam resist
1983 ◽
Vol 1
(2)
◽
pp. 481
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1998 ◽
Vol 37
(3)
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pp. 285-294
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1999 ◽
Vol 38
(2)
◽
pp. 255-266
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1995 ◽
Vol 31
(1)
◽
pp. 85-89
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2001 ◽
Vol 37
(11)
◽
pp. 2231-2237
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2000 ◽
Vol 158
(1)
◽
pp. 169-182
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Keyword(s):
2008 ◽
Vol 85
(1)
◽
pp. 93-99
◽
2004 ◽
Vol 126
(19)
◽
pp. 6124-6134
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Keyword(s):