Estimation of surface kinetic parameters and two-dimensional simulation of InP pattern features during CH4–H2 plasma etching

2000 ◽  
Vol 18 (4) ◽  
pp. 1366-1372 ◽  
Author(s):  
A. Rhallabi ◽  
L. Houlet ◽  
G. Turban
2018 ◽  
Author(s):  
Haibo Li ◽  
Maocheng Tian ◽  
Xiaohang Qu ◽  
Min Wei

AIP Advances ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 055209
Author(s):  
Yong Che ◽  
Qing Zang ◽  
Xiaofeng Han ◽  
Shumei Xiao ◽  
Kai Huang ◽  
...  

Langmuir ◽  
2014 ◽  
Vol 30 (41) ◽  
pp. 12354-12361 ◽  
Author(s):  
Eser M. Akinoglu ◽  
Anthony J. Morfa ◽  
Michael Giersig

2017 ◽  
Vol 50 (9) ◽  
pp. 095001 ◽  
Author(s):  
Emanuele Galiffi ◽  
Christoph Sünderhauf ◽  
Maarten DeKieviet ◽  
Sandro Wimberger

Sign in / Sign up

Export Citation Format

Share Document