Demonstration of broadband radio frequency sensing: Empirical polysilicon etch rate estimation in a Lam 9400 etch tool

2000 ◽  
Vol 18 (4) ◽  
pp. 1297-1302 ◽  
Author(s):  
Craig Garvin ◽  
J. W. Grizzle
2018 ◽  
Vol 25 (5) ◽  
pp. 1619-1625
Author(s):  
Mengwei Li ◽  
Qiuhui Liu ◽  
Qiannan Wu ◽  
Yueping Han

2020 ◽  
Vol 16 (10) ◽  
pp. 155014772096789
Author(s):  
Liqian Zhang ◽  
Xueliang Fu ◽  
Honghui Li

In order to guarantee the tag identification accuracy and efficiency in mobile radio frequency identification system, it is necessary to estimate the tags’ arrival rate before performing identification. This research aims to develop a novel estimation method based on improved grey model(1,1) and sliding window mechanism. By establishing tags’ dynamic arrival model, this article emphasizes the importance of tags’ arrival rate estimation in mobile radio frequency identification system. Using sliding window mechanism and weighted coefficients method, weighted grey model(1,1) with sliding window (WGMSW(1,1)) is proposed based on traditional grey model(1,1). For experimental verification, three kinds of data are used as original data in WGMSW(1,1). The experimental results show that the proposed method has lower estimation error rate, lower computation complexity, and high system stability.


2011 ◽  
Vol 347-353 ◽  
pp. 3107-3115
Author(s):  
Zi Guan Zhou ◽  
Xiao Shan Pan ◽  
Shu Gang Yin ◽  
Wei Li Ren ◽  
Sheng Bo Sun ◽  
...  

With the development of the smart grid, residential electricity services have a higher bandwidth and frequency requirement to the power system communication , the existing power 230MHz narrow-band data transmission communication has been unable to meet the needs of the two-way interaction between the users and the smart grid. In terms of current communication technology in the power system, this paper introduces a wireless broadband radio frequency chip ,which supports 100MHz to 1.2GHz frequency range, and 5KHz to 2MHz tunable bandwidth.With the chip embedded in intelligent electricity interactive terminals, distribution monitoring terminals and other devices, it can achieve flexible and intelligent electricity services. This paper describes the architecture of the RF chip,and gives key technology solutions such as broadband matching, adjustable IF bandwidth of the channel, sums up the advantages of the chip,presents the application in the smart grid. The analysis finds that the chip has a variety of charateristics such as high integration, good redundancy, versatility, flexibility and so on, and can satisfy the growing application needs of power speacial network,and has an extremely promising market .


2010 ◽  
Vol 19 (4) ◽  
pp. 045013 ◽  
Author(s):  
B Paroli ◽  
F De Luca ◽  
G Maero ◽  
R Pozzoli ◽  
M Romé

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