Demonstration of broadband radio frequency sensing: Empirical polysilicon etch rate estimation in a Lam 9400 etch tool
2000 ◽
Vol 18
(4)
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pp. 1297-1302
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Keyword(s):
2020 ◽
Vol 16
(10)
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pp. 155014772096789
2011 ◽
Vol 347-353
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pp. 3107-3115
2009 ◽
Vol 21
(4)
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pp. 206-208
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Keyword(s):
2010 ◽
Vol 19
(4)
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pp. 045013
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Keyword(s):