scholarly journals Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge

1999 ◽  
Vol 17 (6) ◽  
pp. 3209-3217 ◽  
Author(s):  
J. R. Woodworth ◽  
M. G. Blain ◽  
R. L. Jarecki ◽  
T. W. Hamilton ◽  
B. P. Aragon
Keyword(s):  
Vacuum Ultraviolet ◽  
Plasma Processing ◽  
Absolute Intensities ◽  
Ultraviolet Spectra

scholarly journals Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges

2001 ◽  
Vol 19 (1) ◽  
pp. 45-55 ◽  
Author(s):  
J. R. Woodworth ◽  
M. E. Riley ◽  
V. A. Amatucci ◽  
T. W. Hamilton ◽  
B. P. Aragon
Keyword(s):  
Vacuum Ultraviolet ◽  
Plasma Processing ◽  
Absolute Intensities ◽  
Ultraviolet Spectra

Valence-shell Transitions in the Vacuum-Ultraviolet Spectra of Fluorobenzenes

1972 ◽  
Vol 50 (4) ◽  
pp. 543-547 ◽  
Author(s):  
R. Gilbert ◽  
P. Sauvageau ◽  
C. Sandorfy
Keyword(s):  
Vacuum Ultraviolet ◽  
Valence Shell ◽  
Benzene Derivatives ◽  
Ultraviolet Spectra ◽  
Shell Type ◽  
Complete Series

The vacuum–ultraviolet spectra of a nearly complete series of fluorinated benzene derivatives were measured. The assignments of π* ← π and σ* ← σ valence-shell type transitions are discussed as well as the influence that the fluorine substituents exert on these.

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