Microloading effect in ultrafine SiO2 hole/trench etching
1999 ◽
Vol 17
(4)
◽
pp. 1556-1561
◽
Keyword(s):
1997 ◽
Vol 48
(3)
◽
pp. 211-214
◽
1995 ◽
Vol 13
(4)
◽
pp. 1429
◽
Keyword(s):
2000 ◽
Vol 73
(2)
◽
pp. 82-88
1990 ◽
Vol 98
(1141)
◽
pp. 951-956
◽