Measurement of electron energy distribution function in an argon/copper plasma for ionized physical vapor deposition

1999 ◽  
Vol 17 (3) ◽  
pp. 840-844 ◽  
Author(s):  
Z. C. Lu ◽  
J. E. Foster ◽  
T. G. Snodgrass ◽  
J. H. Booske ◽  
A. E. Wendt
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Vapor Deposition ◽  
Electron Energy Distribution Function ◽  
Physical Vapor Deposition ◽  
Energy Distribution Function ◽  
Electron Energy Distribution ◽  
Ionized Physical Vapor Deposition ◽  
Copper Plasma

Electron Energy Distribution Function Measured by Electrostatic Probes at Divertor Plasma in JFT-2M Tokamak

2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Energy Distribution Function ◽  
Electron Energy Distribution
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