Application of target factor analysis and linear least squares fitting to extracting chemical information from Auger depth profiles of a Mo/Si thin multilayer system
1998 ◽
Vol 16
(4)
◽
pp. 2257-2260
◽
2008 ◽
Vol 32
(12)
◽
pp. 2538-2551
◽
1988 ◽
Vol 46
(1)
◽
pp. 185-190
◽
Chemical information obtained from Auger depth profiles by means of advanced factor analysis (MLCFA)
1993 ◽
Vol 64
(1)
◽
pp. 41-57
◽
1971 ◽