Microstructure-dependent ferroelectric properties of SrBi2Ta2O9 thin films fabricated by radio frequency magnetron sputtering

Kwang-Jun Cho; Jeon-Kook Lee; Hyung-Jin Jung; Jong-Wan Park

doi:10.1116/1.581270

Microstructure-dependent ferroelectric properties of SrBi2Ta2O9 thin films fabricated by radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581270 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1258-1261 ◽

Cited By ~ 7

Author(s):

Kwang-Jun Cho ◽

Jeon-Kook Lee ◽

Hyung-Jin Jung ◽

Jong-Wan Park

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Effects of LSMO Buffer Layer on Crystalline Orientation and Ferroelectric Properties of Bi 2.9 Pr 0.9 Ti 3 O 12 Thin Films Prepared by Radio-Frequency Magnetron Sputtering

Chinese Physics Letters ◽

10.1088/0256-307x/25/11/080 ◽

2008 ◽

Vol 25 (11) ◽

pp. 4131-4134 ◽

Cited By ~ 3

Author(s):

Wu Yun-Yi ◽

Zhang Duan-Ming ◽

Yu Jun ◽

Zheng Chao-Dan ◽

Wang Yun-Bo

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Buffer Layer ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Crystalline Orientation

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Effect of crystallization orientation on the domain and ferroelectric properties of (Pb0.90La0.10)Ti0.975O3 thin films by radio frequency magnetron sputtering technique

Thin Solid Films ◽

10.1016/j.tsf.2008.08.197 ◽

2008 ◽

Vol 517 (2) ◽

pp. 1005-1008 ◽

Cited By ~ 1

Author(s):

Jiagang Wu ◽

Jiliang Zhu ◽

Dingquan Xiao ◽

Jianguo Zhu ◽

Junzhe Tan ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Effect of bismuth on the ferroelectric properties of SrBi2Ta2O9 thin films deposited on Pt/SiO2/Si by a modified radio-frequency magnetron sputtering technique

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581373 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2505-2509 ◽

Cited By ~ 2

Author(s):

Cheol-Hoon Yang ◽

Soon-Gil Yoon

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Influence of second phases on the ferroelectric properties of SrBi2TaNbO9 thin films fabricated by radio-frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582152 ◽

2000 ◽

Vol 18 (1) ◽

pp. 17-22 ◽

Cited By ~ 9

Author(s):

Yoon-Baek Park ◽

Se-Myeong Jang ◽

Jeon-Kook Lee ◽

Jong-Wan Park

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Second Phases

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Structural and ferroelectric properties of the c‐axis oriented SrBi2Ta2O9 thin films deposited by the radio‐frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.117122 ◽

1996 ◽

Vol 69 (25) ◽

pp. 3839-3841 ◽

Cited By ~ 67

Author(s):

T. K. Song ◽

J.‐K. Lee ◽

H. J. Jung

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Influence of annealing temperature on ferroelectric properties of SrBi2Ta2O9 thin films prepared by off-axis radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.1317240 ◽

2000 ◽

Vol 88 (10) ◽

pp. 5928-5934 ◽

Cited By ~ 29

Author(s):

S. T. Tay ◽

X. H. Jiang ◽

C. H. A. Huan ◽

A. T. S. Wee ◽

R. Liu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Annealing Temperature ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Enhanced ferroelectric properties of Pb(Zr0.80Ti0.20)O3/PbO thin films prepared by radio frequency magnetron sputtering

Materials Research Bulletin ◽

10.1016/j.materresbull.2007.04.017 ◽

2008 ◽

Vol 43 (3) ◽

pp. 556-560 ◽

Cited By ~ 1

Author(s):

Jiagang Wu ◽

Dingquan Xiao ◽

Junzhe Tan ◽

Jiliang Zhu ◽

Jianguo Zhu ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Ferroelectric Properties ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2021.129320 ◽

2021 ◽

Vol 288 ◽

pp. 129320

Author(s):

Guangqiang He ◽

Zhihui Xiong ◽

Hui Yang ◽

Ming Yang ◽

Zhixi Li ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties

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Fabrication of Mg3Sb2 thin films via radio-frequency magnetron sputtering and analysis of the corresponding electrical properties

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-021-06468-3 ◽

2021 ◽

Author(s):

Jun-ichi Tani ◽

Hiromichi Ishikawa

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.2765 ◽

2001 ◽

Vol 40 (Part 1, No. 4B) ◽

pp. 2765-2768 ◽

Cited By ~ 118

Author(s):

Shogo Ishizuka ◽

Shinya Kato ◽

Takahiro Maruyama ◽

Katsuhiro Akimoto

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Nitrogen Doping ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Cu2o Thin Films

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