Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon: Surface modification for controlled nucleation

1998 ◽  
Vol 16 (3) ◽  
pp. 1316-1320 ◽  
Author(s):  
L. L. Smith ◽  
W. W. Read ◽  
C. S. Yang ◽  
E. Srinivasan ◽  
C. H. Courtney ◽  
...  
Keyword(s):  
Surface Modification ◽  
Amorphous Silicon ◽  
Silicon Surface ◽  
Hydrogenated Amorphous Silicon ◽  
Microcrystalline Silicon ◽  
Silicon Deposition ◽  
Selective Area ◽  
Controlled Nucleation ◽  
Hydrogenated Amorphous

scholarly journals High quality crystalline silicon surface passivation by combined intrinsic and n-type hydrogenated amorphous silicon

2011 ◽  
Vol 99 (20) ◽  
pp. 203503 ◽  
Author(s):  
Jan-Willem A. Schüttauf ◽  
Karine H. M. van der Werf ◽  
Inge M. Kielen ◽  
Wilfried G. J. H. M. van Sark ◽  
Jatindra K. Rath ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
High Quality ◽  
Hydrogenated Amorphous ◽  
Silicon Surface Passivation
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