High energy aluminum ion implantation using a variable energy radio frequency quadrupole implanter

1998 ◽  
Vol 16 (2) ◽  
pp. 472-476 ◽  
Author(s):  
Kensuke Amemiya ◽  
Junya Ito ◽  
Katsumi Tokiguchi
Keyword(s):  
Ion Implantation ◽  
Radio Frequency ◽  
High Energy ◽  
Radio Frequency Quadrupole ◽  
Aluminum Ion ◽  
Variable Energy

scholarly journals Radio Frequency Quadrupole Accelerator: A High Energy and High Current Implanter

10.5772/33823 ◽  
2012 ◽  
Author(s):  
Yuancun Nie ◽  
Yuanrong Lu ◽  
Xueqing Yan ◽  
Jiaer Che
Keyword(s):  
Radio Frequency ◽  
High Energy ◽  
High Current ◽  
Radio Frequency Quadrupole

High energy high current ion implantation system using variable energy RFQ

1994 ◽  
pp. 75-80
Author(s):  
K. Tokiguchi ◽  
K. Amemiya ◽  
J. Ito ◽  
N. Sakudo ◽  
S. Yamada ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Energy ◽  
High Current ◽  
Variable Energy

Variable energy r.f. quadrupole for high-energy ion implantation

1994 ◽  
Vol 66 (1-3) ◽  
pp. 364-367 ◽  
Author(s):  
Junya Ito ◽  
Katsumi Tokiguchi ◽  
Kensuke Amemiya ◽  
Noriyuki Sakudo ◽  
Satoru Yamada ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Energy ◽  
Variable Energy
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