Improved current–voltage characteristics of downstream plasma enhanced chemical vapor deposition SiNx deposited at low temperature by using He as a dilution gas
1997 ◽
Vol 15
(4)
◽
pp. 1864-1873
◽
2003 ◽
Vol 21
(2)
◽
pp. 698
◽
2017 ◽
Vol 78
◽
pp. 374-378
◽
2015 ◽
Vol 212
(12)
◽
pp. 2928-2935
◽
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2006 ◽
Vol 10
(3)
◽
pp. 457-466