Sculptured thin films and glancing angle deposition: Growth mechanics and applications

1997 ◽  
Vol 15 (3) ◽  
pp. 1460-1465 ◽  
Author(s):  
K. Robbie ◽  
M. J. Brett
Keyword(s):  
Thin Films ◽  
Glancing Angle Deposition ◽  
Sculptured Thin Films ◽  
Growth Mechanics ◽  
Glancing Angle ◽  
Angle Deposition

Structure and optical properties of Nb2O5 sculptured thin films by glancing angle deposition

2008 ◽  
Vol 255 (5) ◽  
pp. 2192-2195 ◽  
Author(s):  
Xiudi Xiao ◽  
Guoping Dong ◽  
Cheng Xu ◽  
Hongbo He ◽  
Hongji Qi ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Glancing Angle Deposition ◽  
Sculptured Thin Films ◽  
Glancing Angle ◽  
Angle Deposition

scholarly journals Microstructure-Induced Anisotropic Optical Properties of YF3 Columnar Thin Films Prepared by Glancing Angle Deposition

Nanomaterials ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 2413
Author(s):  
Yao Shan ◽  
Pian Liu ◽  
Yao Chen ◽  
Haotian Zhang ◽  
Huatian Tu ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Volume Fraction ◽  
Electron Beam Evaporation ◽  
Glancing Angle Deposition ◽  
Refractive Indices ◽  
Glancing Angle ◽  
Axis Parallel ◽  
Angle Deposition ◽  
Deposition Angle

Yttrium fluoride (YF3) columnar thin films (CTFs) were fabricated by electron beam evaporation with the glancing angle deposition method. The microstructures and optical properties of YF3 CTFs were studied systematically. The YF3 films grown at different deposition angles are all amorphous. As the deposition angle increases, the columns in YF3 CTFs become increasingly separated and inclined, and the volume fraction of YF3 decreases, resulting in lower refractive indices. This phenomenon is attributed to the self-shadowing effect and limited adatom diffusion. The YF3 CTFs are optically biaxial anisotropic with the long axis (c-axis) parallel to the columns, the short axis (b-axis) perpendicular to the columns, and the other axis (a-axis) parallel to the film interface. The principal refractive index along the b-axis for the 82°-deposited sample is approximately 1.233 at 550 nm. For the 78°-deposited sample, the differences of principal refractive indices between the c-axis and the b-axis and between the a-axis and the b-axis reach the maximum 0.056 and 0.029, respectively. The differences of principal refractive indices were affected by both the deposition angle and the volume fraction of YF3.

Disassembling Glancing Angle Deposited Films for High-Throughput, Single-Post Growth Scaling Measurements

2012 ◽  
Vol 18 (5) ◽  
pp. 1135-1142 ◽  
Author(s):  
Joshua Morgan Arthur Siewert ◽  
Joshua Michael LaForge ◽  
Michael Thomas Taschuk ◽  
Michael Julian Brett
Keyword(s):  
High Throughput ◽  
Glancing Angle Deposition ◽  
Rotation Rates ◽  
Growth Mechanics ◽  
Glancing Angle ◽  
Scaling Parameters ◽  
The Individual ◽  
Growth Scaling ◽  
Deposited Films ◽  
Angle Deposition

AbstractWith growing interest in nanostructured thin films produced by glancing angle deposition (GLAD), it becomes increasingly important to understand their overall growth mechanics and nanocolumn structure. We present a new method of isolating the individual nanocolumns of GLAD films, facilitating automated measurement of their broadening profiles. Data collected for α = 81° TiO2 vertical nanocolumns deposited across a range of substrate rotation rates demonstrates that these rates influence growth scaling parameters. Further, individual posts were found in each case that violate predicted Kardar-Parisi-Zhang growth scaling limits. The technique's current iteration is comparable to existing techniques in speed: though data were studied from 10,756 individual objects, the majority could not be confidently used in subsequent analysis. Further refinement may allow high-throughput automated film characterization and permit close examination of subtle growth trends, potentially enhancing control over GLAD film broadening and morphology.

Anisotropic Co-Hf Thin Films for Micro-Sensors and Micro-Transducers

2015 ◽  
Vol 644 ◽  
pp. 65-69
Author(s):  
V. Madurga ◽  
C. Favieres ◽  
J. Vergara
Keyword(s):  
Magnetic Field ◽  
Thin Films ◽  
Transverse Direction ◽  
Anisotropy Field ◽  
Transverse Magnetic ◽  
Glancing Angle Deposition ◽  
Maximum Value ◽  
Easy Direction ◽  
Glancing Angle ◽  
Angle Deposition

Thin films of Co-Hf (≈ 86-14 % at.) were grown over Si micro-cantilevers using a glancing-angle deposition technique. A controlled easy direction of magnetisation (anisotropy field μoHk ≈ 0.1 T) in the longitudinal or in the transverse direction of the micro-cantilevers was generated. The mechanical properties of the films under the action of a magnetic field were opposite depending on the magnetisation’s easy direction: i) their deflection was either zero or the maximum value depending on the direction of the applied magnetic field with respect to the parallel or transverse easy direction of magnetisation; ii) the shift in the resonance frequency under a longitudinal or transverse magnetic field was also different depending on the longitudinal or transverse easy direction of magnetisation. The use of these coated devices with micromagnet-like films for sensors and transducers is discussed.

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