Silicon epitaxy from pulsed supersonic jets: Growth, modeling, and simulation
1997 ◽
Vol 15
(4)
◽
pp. 2219-2225
2002 ◽
Vol 24
(1-2)
◽
pp. 128-132
◽
Keyword(s):
2013 ◽
Vol 6
(11)
◽
pp. 2061-2066
Keyword(s):
1991 ◽
Vol 38
(4)
◽
pp. 386-389
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):