Silicon epitaxy from pulsed supersonic jets: Growth, modeling, and simulation

1997 ◽  
Vol 15 (4) ◽  
pp. 2219-2225
Author(s):  
Rajeev Malik ◽  
Erdogan Guljari
1987 ◽  
Vol 8 (2) ◽  
pp. 2_79-86
Author(s):  
Kyoei NISHIKAWA ◽  
Miyoko HIWATASHI ◽  
Kiku KANBE ◽  
Toshiaki SHIIBAYASHI ◽  
Kazunori TAKAHASHI

2004 ◽  
Author(s):  
Kathleen Bentein ◽  
Robert J. Vandenberg ◽  
Christian Vandenberghe ◽  
Florence Stinglhamber

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