Silicon surfaces treated by CF4, CF4/H2, and CF4/O2 rf plasmas: Study by in situ Fourier transform infrared ellipsometry

Tatsuru Shirafuji; Winfred W. Stoffels; Hiroshi Moriguchi; Kunihide Tachibana

doi:10.1116/1.580514

Silicon surfaces treated by CF4, CF4/H2, and CF4/O2 rf plasmas: Study by in situ Fourier transform infrared ellipsometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580514 ◽

1997 ◽

Vol 15 (2) ◽

pp. 209-215 ◽

Cited By ~ 9

Author(s):

Tatsuru Shirafuji ◽

Winfred W. Stoffels ◽

Hiroshi Moriguchi ◽

Kunihide Tachibana

Keyword(s):

Fourier Transform ◽

Fourier Transform Infrared ◽

Silicon Surfaces ◽

Rf Plasmas ◽

Infrared Ellipsometry

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Observations of Silicon Surfaces Exposed to Inductively Coupled CHF3and C4F8/H2Plasmas Using Fourier Transform Infrared Ellipsometry

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4522 ◽

1998 ◽

Vol 37 (Part 1, No. 8) ◽

pp. 4522-4526 ◽

Cited By ~ 7

Author(s):

Ho-Jun Lee ◽

Hideki Motomura ◽

Kunihide Tachibana

Keyword(s):

Fourier Transform ◽

Fourier Transform Infrared ◽

Silicon Surfaces ◽

Inductively Coupled ◽

Infrared Ellipsometry

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Optically accessible bench-scale fast pyrolysis reactor for in-situ analysis using Fourier transform infrared spectroscopy

10.31274/etd-180810-4710 ◽

2016 ◽

Author(s):

Eric Kok Hsien Chon

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fast Pyrolysis ◽

Fourier Transform Infrared ◽

In Situ Analysis ◽

Bench Scale ◽

Pyrolysis Reactor

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Dependence of the intrinsic phase structure of Bi2O3 catalysts on photocatalytic CO2 reduction

Catalysis Science & Technology ◽

10.1039/d1cy00286d ◽

2021 ◽

Vol 11 (6) ◽

pp. 2021-2025

Author(s):

Liujin Wei ◽

Guan Huang ◽

Yajun Zhang

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Phase Structure ◽

Co2 Reduction ◽

Fourier Transform Infrared ◽

Time Resolved ◽

Dependent Activity

The combination of time-resolved transient photoluminescence with in-situ Fourier transform infrared spectroscopy has been conducted to investigate the intrinsic phase structure-dependent activity of Bi2O3 catalyst for CO2 reduction.

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In-situ observation of photocatalysis of gaseous trichloroethylene using a fourier transform infrared in the presence of a visible light responding homemade oxynitride doped TiO2 under blue LED and violet LED irradiations

Journal of Materials Research and Technology ◽

10.1016/j.jmrt.2020.11.094 ◽

2021 ◽

Vol 10 ◽

pp. 15-23

Author(s):

Woo Sug Yoon ◽

Ho Sug Lee ◽

Kiin Choi ◽

Tai Kyu Lee

Keyword(s):

Fourier Transform ◽

Visible Light ◽

Fourier Transform Infrared ◽

In Situ Observation ◽

Doped Tio2 ◽

Blue Led

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In-Situ Fourier Transform Infrared Spectroscopy Study on CO Oxidation Over Au/Titanate and Au/Titania Nanocatalysts

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2009.c184 ◽

2009 ◽

Vol 9 (2) ◽

pp. 1483-1486

Author(s):

Jinhua Jiang ◽

Qiuming Gao ◽

Juan Hu

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Co Oxidation ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Spectroscopy Study

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A simple method to fabricate lenses for in situ Fourier transform infrared spectroscopy

Review of Scientific Instruments ◽

10.1063/1.1146872 ◽

1996 ◽

Vol 67 (4) ◽

pp. 1454-1457 ◽

Cited By ~ 1

Author(s):

Lia M. Treffman ◽

Philip W. Morrison

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Simple Method

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In-situ investigation of the film growth mechanism using multiple internal reflection fourier transform infrared spectroscopy (MIRFTIRS) Part I. Behaviour of iron and platinum electrodes in alkaline methanolic solutions

Journal of Electroanalytical Chemistry ◽

10.1016/0022-0728(86)80066-3 ◽

1986 ◽

Vol 201 (2) ◽

pp. 413-421 ◽

Cited By ~ 37

Author(s):

Minh-Chau Pham ◽

Fatos Adami ◽

Pierre-Camille Lacaze ◽

Jean-Pierre Doucet ◽

Jacques-Emile Dubois

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Growth Mechanism ◽

Film Growth ◽

Fourier Transform Infrared ◽

Internal Reflection ◽

Platinum Electrodes ◽

In Situ Investigation

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Surface effects in photochemistry: an in situ cylindrical internal reflection-Fourier transform infrared investigation of the effect of ring substituents on chemisorption onto titania ceramic membranes

Langmuir ◽

10.1021/la00038a030 ◽

1992 ◽

Vol 8 (2) ◽

pp. 487-495 ◽

Cited By ~ 89

Author(s):

Simonetta Tunesi ◽

Marc A. Anderson

Keyword(s):

Fourier Transform ◽

Fourier Transform Infrared ◽

Surface Effects ◽

Ceramic Membranes ◽

Internal Reflection

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Study of lactol activation by trifluoroacetic anhydride via in situ Fourier transform infrared spectroscopy

Analytica Chimica Acta ◽

10.1016/j.aca.2003.08.043 ◽

2003 ◽

Vol 497 (1-2) ◽

pp. 155-164 ◽

Cited By ~ 8

Author(s):

Yadan Chen ◽

George X. Zhou ◽

Nicole Brown ◽

Tao Wang ◽

Zhihong Ge

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Trifluoroacetic Anhydride

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Detection of dry etching product species with in situ Fourier transform infrared spectroscopy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.584442 ◽

1989 ◽

Vol 7 (1) ◽

pp. 35 ◽

Cited By ~ 17

Author(s):

T. A. Cleland

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Dry Etching ◽

Product Species

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