New multicomponent transparent conducting oxide films for transparent electrodes of flat panel displays

1996 ◽  
Vol 14 (3) ◽  
pp. 1689-1693 ◽  
Author(s):  
Tadatsugu Minami ◽  
Shinzo Takata ◽  
Toshikazu Kakumu
Keyword(s):  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Flat Panel Displays ◽  
Transparent Electrodes ◽  
Flat Panel ◽  
Transparent Conducting

Microstructure and Electrical Properties of AZO Films Prepared by RF Magnetron Sputtering

2011 ◽  
Vol 264-265 ◽  
pp. 754-759 ◽  
Author(s):  
Bakri Jufriadi ◽  
Agus Geter E. Sutjipto ◽  
R. Othman ◽  
R. Muhida
Keyword(s):  
Magnetron Sputtering ◽  
Deposition Time ◽  
Transparent Conducting Oxide ◽  
Rf Magnetron Sputtering ◽  
Flat Panel Displays ◽  
Emi Shielding ◽  
Transparent Conducting ◽  
Deposition Processes ◽  
Electro Magnetic ◽  
Static Discharge

AZO is an ideal replacement transparent conducting oxide (TCO) for ITO to all corresponding applications. The typical applications include: transparent electrodes for solar cells, flat panel displays, LCD electrodes, electro-magnetic compatibility (RF-EMI shielding) coatings, touch panel transparent contacts, static discharge dissipation. The production of useful and commercially attractive thin films using different deposition processes is very important parameter to investigate. A systematic study of the sputtering condition and their influenced on electrical and structural were studied. In this work, AZO films were deposited by RF magnetron sputtering at 200 °C. The result shows that the deposited time has influenced the characteristic of deposited AZO films. For a longer deposition time, thin film shows a uniform grain growth. The resistivity found minimum at the deposition time of 45 minutes. It can be considered that by reducing of the grain boundaries which enable the electron carries to conduct smoothly.

Nanostructured Transparent Conducting Oxide Films for Polarization Control with Plasmonic Metasurfaces

CLEO: 2014 ◽  
2014 ◽  
Author(s):  
Jongbum Kim ◽  
Yang Zhao ◽  
Aveek Dutta ◽  
Sajid M. Choudhury ◽  
Alexander V. Kildishev ◽  
...  
Keyword(s):  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Polarization Control ◽  
Transparent Conducting

Properties of multilayer transparent conducting oxide films

2004 ◽  
Vol 461 (2) ◽  
pp. 309-315 ◽  
Author(s):  
E.J.J Martin ◽  
M Yan ◽  
M Lane ◽  
J Ireland ◽  
C.R Kannewurf ◽  
...  
Keyword(s):  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Transparent Conducting

Atomic Layer Deposition of Gallium-Doped Zinc Oxide Transparent Conducting Oxide films

2011 ◽  
Vol 1315 ◽  
Author(s):  
Paul R. Chalker ◽  
Paul A. Marshall ◽  
Simon Romani ◽  
Matthew J. Rosseinsky ◽  
Simon Rushworth ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Film Thickness ◽  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Contactless Measurement ◽  
Zinc Oxide Films ◽  
Transparent Conducting ◽  
Layer Deposition

ABSTRACTThin transparent conducting oxide (TCO) films of gallium-doped zinc oxide have been deposited on glass substrates by atomic layer deposition (ALD) using diethyl zinc, triethyl gallium and water vapour as precursors. The gallium-doped zinc oxide films were deposited over the temperature range 100-350°C. Transmission electron microscopy reveals that the as-deposited films are polycrystalline in character. The electrical resistivity of the gallium-doped zinc oxide films was evaluated using four-point probe and contactless measurement methods as a function of film thickness. The lowest sheet resistance of 16 Ω/☐ was measured from a film thickness of 400nm and a gallium content of 5 atomic percent. The electron Hall mobility of this film was 12.3 cm2/Vs. The visible transmittance of the films was 78% with a haze of 0.2%.

Sol–gel versus sputtering indium tin oxide films as transparent conducting oxide materials

2016 ◽  
Vol 27 (5) ◽  
pp. 4913-4922 ◽  
Author(s):  
M. Duta ◽  
M. Anastasescu ◽  
J. M. Calderon-Moreno ◽  
L. Predoana ◽  
S. Preda ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Transparent Conducting Oxide ◽  
Sol Gel ◽  
Oxide Films ◽  
Oxide Materials ◽  
Transparent Conducting ◽  
Tin Oxide Films
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