TiN barrier layer formation by the two‐step rapid thermal conversion process
1996 ◽
Vol 14
(6)
◽
pp. 3245-3251
◽
1998 ◽
Vol 28
(6)
◽
pp. 1089-1106
◽
2012 ◽
Vol 232
◽
pp. 788-791
Keyword(s):
2002 ◽
Vol 107
(C12)
◽
pp. SRF 19-1-SRF 19-9
◽