Physical properties and chemical states of rf sputter deposited SiWOx films
1996 ◽
Vol 14
(4)
◽
pp. 2243-2246
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2014 ◽
Vol 2
(1)
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pp. 016401
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2009 ◽
Vol 5
◽
pp. 012022
1973 ◽
Vol 120
(11)
◽
pp. 1535
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Keyword(s):
2018 ◽
Vol 5
(9)
◽
pp. 096401
◽
Keyword(s):
2000 ◽
Vol 18
(3)
◽
pp. 819-822
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Keyword(s):