Characteristics of reactively sputtered Pt–SnO2 thin films for CO gas sensors

1996 ◽  
Vol 14 (4) ◽  
pp. 2215-2219 ◽  
Author(s):  
M. Di Giulio ◽  
G. Micocci ◽  
A. Serra ◽  
A. Tepore ◽  
R. Rella ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Sno2 Thin Films ◽  
Co Gas

Undoped and Pd-doped SnO2 thin films for gas sensors

1993 ◽  
Vol 16 (1-3) ◽  
pp. 357-362 ◽  
Author(s):  
B. Gautheron ◽  
M. Labeau ◽  
G. Delabouglise ◽  
U. Schmatz
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Sno2 Thin Films

Microstructural development during the oxidation process in SnO2 thin films for gas sensors

1994 ◽  
Vol 19 (1-3) ◽  
pp. 637-641 ◽  
Author(s):  
T. Aste ◽  
D. Beruto ◽  
R. Botter ◽  
C. Ciccarelli ◽  
M. Giordani ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Oxidation Process ◽  
Microstructural Development ◽  
Sno2 Thin Films

A Simple and Effective Route to Annihilate Defects in Nanocrystalline SnO2 Thin Films Prepared by Pulsed Laser Deposition

2007 ◽  
Vol 1026 ◽  
Author(s):  
Zhiwen Chen ◽  
C. M. L. Wu ◽  
C. H. Shek ◽  
J. K. L. Lai ◽  
Z. Jiao ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
High Resolution ◽  
Pulsed Laser Deposition ◽  
Gas Sensors ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Transmission Electron ◽  
Sno2 Thin Films

AbstractThe microstructural defects of nanocrystalline SnO2 thin films prepared by pulsed laser deposition have been investigated using transmission electron microscopy, high-resolution transmission electron microscopy and Raman spectroscopy. Defects inside nanocrystalline SnO2 thin films could be significantly reduced by annealing the SnO2 thin films at 300 °C for 2 h. High-resolution transmission electron microscopy showed that stacking faults and twins were annihilated upon annealing. In particular, the edges of the SnO2 nanoparticles demonstrated perfect lattices free of defects after annealing. Raman spectra also confirmed that annealing the specimen was almost defect-free. By using thermal annealing, defect-free nanocrystalline SnO2 thin films can be prepared in a simple and practical way, which holds promise for applications as transparent electrodes and solid-state gas sensors.

Catalyst free vapor–solid deposition of morphologically different β-Ga2O3 nanostructure thin films for selective CO gas sensors at low temperature

2016 ◽  
Vol 8 (15) ◽  
pp. 3224-3235 ◽  
Author(s):  
K. Girija ◽  
S. Thirumalairajan ◽  
Valmor R. Mastelaro ◽  
D. Mangalaraj
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Catalyst Free ◽  
Unique Shape ◽  
Co Sensor ◽  
Co Gas ◽  
Solid Deposition

As prepared β-Ga2O3 thin films not only possess a unique shape but also influence the morphology dependent high sensitivity CO sensor at 100 °C.

Optical Gas Sensor Using Cobalt Oxide Thin Film Prepared by Pulsed Laser Ablation

2005 ◽  
Vol 900 ◽  
Author(s):  
Hyun-Jeong Nam ◽  
Takeshi Sasaki ◽  
Naoto Koshizaki
Keyword(s):  
Thin Films ◽  
Surface Area ◽  
Cobalt Oxide ◽  
Gas Sensors ◽  
Structural Changes ◽  
Pulsed Laser ◽  
High Sensitivity ◽  
Detection Sensitivity ◽  
Oxide Thin Film ◽  
Co Gas

ABSTRACTGas sensors based on optical absorption changes in thin films are of interest for detection of various gases such as CO, NO, H2. Optical gas sensors have several advantages over conventional electronic gas sensors, including the potential for higher sensitivity, reduced signal noise, and compatibility with combustible gases. Pulsed laser deposition (PLD) is an excellent method to prepare thin films with controllable thickness, composition and microstructures. Recently, our group reported that films of cobalt oxide prepared by PLD exhibit remarkably high sensitivity), showing an absorbance change in CO gas 70 times greater than those prepared by sputtering methods). Here we examine the effect of film microstructure and composition on CO gas sensing properties in order to identify the origin of the high sensitivity. Cobalt oxide films were prepared by PLD from a CoO target in an inert argon gas at various pressures. Films prepared near vacuum were smooth and continuous while the porosity and grain size increased linearly with pressure. In addition the pressure affected the composition and the thickness of the films. Data on the detection of CO gas suggests a direct relationship between sensitivity to CO gas and the effective surface area of films. We will discuss how the ablation plume can be used to tune the surface area for optimal sensitivity, and will demonstrate origin of the high detection sensitivity based on the structural changes with detecting gas.

Sb and Bi implanted SnO2 thin films: photoemission studies and application as gas sensors

1993 ◽  
Vol 70-71 ◽  
pp. 359-362 ◽  
Author(s):  
R.S. Dale ◽  
C.S. Rastomjee ◽  
F.H. Potter ◽  
R.G. Egdell ◽  
T.J. Tate
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Sno2 Thin Films
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